Piezoelectric stick-slip linear motor equipped with inclined-ladder-shaped amplitude amplifying mechanism, and excitation method for piezoelectric stick-slip linear motor

Abstract

The invention discloses a piezoelectric stick-slip linear motor equipped with an inclined-ladder-shaped amplitude amplifying mechanism, and an excitation method for the piezoelectric stick-slip linear motor, and solves the problem that the output mechanical performance of the current piezoelectric stick-slip linear motor is limited caused by difficulty in comprehensive regulation and control on the friction force, and the like. The piezoelectric stick-slip linear motor comprises a base, a pre-loading assembly, an inclined-ladder-shaped stator and a mover, wherein the inclined-ladder-shaped amplitude amplifying switching mechanism of the stator has a micro-displacement amplifying function, and lateral displacement can be generated due to the axial uneven rigidity distribution; meanwhile, the friction driving force is increased while the friction resistance is decreased; the friction regulation and control wave is coupled and overlapped to the sawtooth driving wave in the rapid deformation driving stage of the inclined-ladder-shaped stator so as to reduce the friction resistance between the stator and the mover in the rapid deformation driving stage; and therefore, the comprehensive regulation and control on the friction force is realized, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is improved. The piezoelectric stick-slip linear motor has the characteristics of compact structure, convenience in assembling, high positioning precision, long journey and the like, and can be widely applied to semiconductor processing, and other micro-nano precision driving and positioning technical fields.

Description

technical field [0001] The invention relates to a piezoelectric stick-slip linear motor with an inclined ladder type amplitude amplification mechanism and an excitation method thereof, belonging to the technical field of micro-nano precision driving and positioning. Background technique [0002] Piezoelectric stick-slip linear motor is a kind of inverse piezoelectric effect based on piezoelectric elements. The stator (or vibrator) is excited by an asymmetrical electric signal to generate a small amplitude high-frequency vibration, which is realized by friction coupling between the stator and the mover. A micro-nano precision piezoelectric stick-slip linear motor with mechanical energy output. According to different driving principles, piezoelectric stick-slip linear motors are mainly divided into two categories: resonant piezoelectric motors (also called ultrasonic motors) and non-resonant piezoelectric motors (also called piezoelectric stick-slip motors). Compared with the...

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Problems solved by technology

[0004] In order to solve the technical problems of the existing piezoelectric stick-slip linear motors due to the difficulty in comprehensive regulation of the friction between the stator and the mover, the mechanical output characteristics are limited, the sawtooth-like uneven motion output is generated, and the output performance is deteriorated, etc., the present invention discloses a Piezoelectric stick-slip linear motor with inclined ladder type amplitude amplification mechanism and its excitation method

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