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Inclined Trapezoid Orthogonal Drive Type Piezoelectric Stick-Slip Linear Motor and Its Composite Excitation Method

A linear motor and oblique trapezoidal technology, which is applied in the field of micro-nano precision drive and positioning, can solve the problems of sawtooth-like unstable motion output, degraded drive output performance, and difficulties in comprehensive friction control, etc., to achieve improved mechanical output characteristics, displacement return The effect of reducing the retreat rate and improving output efficiency

Active Publication Date: 2017-08-29
CHANGCHUN UNIV OF TECH
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Problems solved by technology

[0004] In order to solve the technical problems of the existing piezoelectric stick-slip linear motors, such as the difficulty in comprehensive regulation of the friction between the stator and the mover, the limited mechanical output characteristics, the generation of sawtooth-like uneven motion output, and the deterioration of the output performance of the driver, the present invention discloses An oblique trapezoidal orthogonal drive type piezoelectric stick-slip linear motor and its compound excitation method

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  • Inclined Trapezoid Orthogonal Drive Type Piezoelectric Stick-Slip Linear Motor and Its Composite Excitation Method
  • Inclined Trapezoid Orthogonal Drive Type Piezoelectric Stick-Slip Linear Motor and Its Composite Excitation Method
  • Inclined Trapezoid Orthogonal Drive Type Piezoelectric Stick-Slip Linear Motor and Its Composite Excitation Method

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specific Embodiment approach 1

[0022] Specific implementation mode one: combine Figure 1~Figure 9 This embodiment will be described. This embodiment provides a specific implementation of an oblique trapezoidal orthogonal drive piezoelectric stick-slip linear motor. The oblique trapezoidal orthogonal drive type piezoelectric stick-slip linear motor is composed of a loading device 1 , a stator 2 and a mover 3 .

[0023]The loading device 1 is a pre-tightening force adjustment device of an oblique trapezoidal orthogonal drive type piezoelectric stick-slip linear motor, and the loading device 1 is composed of a fixed frame 1-1, a slide table 1-2, and a loading mechanism 1-3 , the loading device 1 can be made of stainless steel. The fixed frame 1-1 is provided with a mover installation threaded hole 1-1-1, and a mover installation plane 1-1-8, which are used to install the mover 3; the bottom of the fixed frame 1-1 is provided with a fixed frame installation hole 1-1-2, used for the installation and fixing o...

specific Embodiment approach 2

[0026] Specific implementation mode two: combination Figure 10 This embodiment will be described. This implementation mode provides a specific implementation scheme of a compound excitation method for an oblique trapezoidal orthogonal drive type piezoelectric stick-slip linear motor. The composite excitation method of the inclined trapezoidal orthogonal drive type piezoelectric stick-slip linear motor is as follows.

[0027] The composite excitation electric signal adopted in the composite excitation method is compositely superimposed on the drive wave in the rapid deformation stage of the stator by the friction control wave, the friction control wave is a sine wave, and the drive wave is a sawtooth wave. Specifically, the composite excitation method The composite excitation electric signal used in the method is composed of a micro-amplitude friction sine control wave superimposed on the rapid deformation driving stage of the sawtooth driving wave. The composite excitation m...

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Abstract

Provided are an oblique-trapezoid orthogonal driving type piezoelectric stick-slip linear motor and a compound excitation method thereof. The problem that for a current piezoelectric stick-slip linear motor, due to the fact that comprehensive regulation of friction force is difficult, the mechanical output characteristic is degraded is solved. The motor is composed of a loading device, a stator and a rotor; the stator utilizes an oblique-trapezoid motion converter to produce lateral displacement, friction drive force is increased, and frictional resistance is reduced; meanwhile, a friction regulation wave is compositely overlaid in a sawtooth drive wave in the rapid deformation stage of the stator, the frictional resistance between the staror and the rotor in the rapid deformation stage is reduced, comprehensive regulation of the friction force is achieved, and the mechanical output characteristic of the linear piezoelectric motor is significantly improved. The oblique-trapezoid orthogonal driving type piezoelectric stick-slip linear motor has the advantages of being simple in structure, high in precision, large in stroke and the like, and an excellent application prospect in the fields such as semiconductor processing and optical focusing which achieve miniaturization of the structure and require accurate positioning is achieved.

Description

technical field [0001] The invention relates to an oblique trapezoidal orthogonal drive type piezoelectric stick-slip linear motor and a compound excitation method thereof, belonging to the technical field of micro-nano precision drive and positioning. Background technique [0002] Piezoelectric stick-slip linear motor is a kind of piezoelectric stick-slip linear motor that uses the inverse piezoelectric effect of piezoelectric elements to excite the vibrator (or stator) to generate micro-vibration under the excitation of an asymmetric electrical signal, and realizes mechanical energy output through the frictional coupling between the vibrator and the mover. precision micro-nano actuators. According to different driving working principles, piezoelectric stick-slip linear motors are mainly divided into two categories: resonant piezoelectric motors (also called ultrasonic motors) and non-resonant piezoelectric motors (also called piezoelectric stick-slip motors). Compared wit...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/02H02N2/04H02N2/06
CPCH02N2/02H02N2/04H02N2/06
Inventor 程廷海付贤鹏张邦成柳虹亮秦峰宋兆阳
Owner CHANGCHUN UNIV OF TECH
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