Two-dimensional flexible shear stress sensor and measuring method thereof

Abstract

The invention discloses a two-dimensional flexible shear stress sensor and a measuring method thereof, and belongs to the technical field of electronic devices. The two-dimensional flexible shear stress sensor comprises an X hot line and a Y hot line which are made of a heat-sensitive material Ni. The X hot line is composed of a first X sub hot line and a second X sub hot line. The Y hot line is composed of a first Y sub hot line and a second Y sub hot line. The two ends of the first X sub hot line, the second X sub hot line, the first Y sub hot line and the second Y sub hot line are respectively coupled to drive electrodes made of copper. External electrodes made of copper are arranged on an underlying substrate. Each drive electrode is connected with the corresponding external electrode through a copper wire. A surface substrate fully covers the X hot line, the Y hot line and the drive electrodes, and the surface substrate does not cover the external electrodes. According to the invention, the fluid change resolution in the boundary layer of a flow field is improved, the two-dimensional shear stress in the boundary layer of fluid under the condition of high Reynolds number can be measured accurately, and sensor arraying is facilitated.

Description

technical field [0001] The invention belongs to the technical field of electronic devices, and relates to a two-dimensional flexible shear stress sensor and a measurement method thereof, in particular to a sensor for measuring two-dimensional shear force on the surface of an unmanned aerial vehicle. Background technique [0002] With the development and integration of emerging interdisciplinary disciplines and directions such as fluid mechanics, biomedicine, new material technology, and sensor technology, flexible shear stress sensors that can accurately measure the shear stress in the fluid boundary layer have been favored by researchers in the above fields. It has been widely used in disciplines and industries such as aircraft structural mechanics, aerodynamics and machinery manufacturing. [0003] The fluid boundary layer is a thin flow layer with non-negligible viscous force close to the object surface in the flow around the high Reynolds number, also known as the bounda...

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Problems solved by technology

[0007] In order to achieve the above object, the present invention provides a two-dimensional flexible shear stress sensor, which is a shear stress sensor with a symmetrical structure based on MEMS technology, which solves the problem of the existing sensor in measuring the two-dimensional shear stress in the fluid boundary layer at a high Reynolds number. exact question

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