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Method using vacuum negative-pressure slip casting technology to prepare ITO target material

A technology of grouting molding and vacuum negative pressure, which is applied in the field of materials, can solve problems such as long molding time, insufficient strength, and difficulties in large-sized blanks, and achieve the goals of reducing time and cost, reducing internal stress, and improving product quality. Effect

Active Publication Date: 2016-10-26
LUOYANG RUIDE MATERIAL TECH SERVICES CO LTD
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Problems solved by technology

However, the existing grouting molding method takes a long time to form, the density of the green body is low, the strength is insufficient, and it is easy to crack and damage. After molding, high-temperature vacuum degreasing is required before sintering.

Method used

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  • Method using vacuum negative-pressure slip casting technology to prepare ITO target material

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specific Embodiment

[0049] combined with figure 1 , First prepare the vacuum negative pressure grouting equipment, the size of the movable mold frame 2 is 300X600Xh mm, and the cavity height h is adjusted according to the needs.

[0050] Take 8000 g of indium oxide powder with a purity of more than 99.99% and an average particle size of 40 nm, 820 g of tin oxide powder, and 2000 g of sol with an indium oxide content of 10% and a particle size of 10 nm. After mixing them together, add them to the grinder and grind for 12 hours. The ground slurry 9 is subjected to vacuum degassing treatment, and then injected into the mold cavity, so that the slurry 9 completely fills the mold cavity and smoothes the surface, and is covered with a flexible high-temperature-resistant vacuum sealing film 1 .

[0051] Vacuum and dehydrate for 30 minutes, remove the water in the vacuum chamber 6, continue to vacuum and start heating, control the heating rate to be 10 degrees per hour, and keep the temperature for 1 ho...

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Abstract

The invention discloses a method using the vacuum negative-pressure slip casting technology to prepare an ITO target material and relates to the field of materials. The method is characterized in that the method uses sol such as indium oxide, tin oxide, zirconium oxide, cerium oxide or bismuth oxide as the binder instead of organic binder to prepare slurry and uses vacuum negative-pressure slip casting, vacuum negative pressure is flexibly applied to the slurry to reduce the forming internal stress of a green body, and forming, drying and pre-sintering are completed in one step in an in-situ manner. The method has the advantages that the preparation time and cost of ITO can be reduced effectively, product quality can be increased, and the method is especially suitable for preparing a large-specification ITO target material; the method is suitable for the forming of the ITO target material and the forming of ceramic target materials such as AZO and IGZO.

Description

【Technical field】 [0001] The invention relates to the field of materials, in particular to a method for preparing an ITO target, in particular to a method for preparing an ITO target using a vacuum negative pressure grouting technology. 【Background technique】 [0002] It is known that the ITO target blank forming technology is divided into two categories: dry forming and wet forming, among which dry forming is widely used. [0003] Existing dry molding generally adopts the method of first molding and then cold isostatic pressing, that is, the ITO powder is directly placed in the mold, and the preform is obtained by axial pressure molding through a hydraulic press, and then the preform is put into cold isostatic pressing. Increase the density of the green body in the machine to obtain a qualified green body. The method is simple in operation and short in process, but the blanks obtained by this method have the defects of uneven density of the formed blanks and easy delaminat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/457C04B35/622B28B1/26B28B11/24
CPCB28B1/26B28B1/261B28B1/265B28B11/243C04B35/457C04B35/622C04B2235/3229C04B2235/3244C04B2235/3286C04B2235/3293C04B2235/3298
Inventor 陈志强
Owner LUOYANG RUIDE MATERIAL TECH SERVICES CO LTD
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