Portable high-precision laser long-working distance auto-collimation apparatus and method thereof
A portable, high-precision technology, applied in the field of precision measurement and optical engineering, can solve the problems that self-collimation and micro-angle measurement cannot be realized, the range should not be too large, and the reflected beam deviates from the entrance pupil, etc.
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specific Embodiment 1
[0075] This embodiment is an embodiment of a portable high-precision laser self-collimation device with a large working distance.
[0076] The portable high-precision laser self-collimation device with large working distance in this embodiment has a schematic structural diagram as follows figure 2 shown. The self-collimation device includes a light source 1, a reflective collimating mirror 22, a reflective mirror 3, and a feedback imaging system 6. The reflective mirror 3 is provided with an angle adjustment measuring device 4; After the straight mirror 22 is collimated into a parallel beam, it is reflected by the mirror 3 and incident on the surface of the object to be measured 5; the beam reflected from the surface of the object to be measured 5 is reflected by the mirror 3 and then collected by the feedback imaging system 6 imaging;
[0077] The feedback imaging system 6 is arranged between the light source 1 and the reflective collimating mirror 22, including a first fe...
specific Embodiment 2
[0080] This embodiment is an embodiment of a portable high-precision laser self-collimation device with a large working distance.
[0081] The portable high-precision laser self-collimation device with large working distance in this embodiment has a schematic structural diagram as follows Figure 7 shown. On the basis of the specific embodiment 1, the portable high-precision laser auto-collimation device with large working distance in this embodiment is further provided with a wavefront detection system 7 and a wavefront compensation system 8;
[0082] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflection mirror 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected light path of the wavefront detection beam splitter 71, and the mirror deformation wavefront detector 73 is arranged on...
specific Embodiment 3
[0084] This embodiment is an embodiment of a portable high-precision laser self-collimation device with a large working distance.
[0085] The portable high-precision laser self-collimation device with large working distance in this embodiment has a schematic structural diagram as follows Figure 8 shown. On the basis of the specific embodiment 1, the portable high-precision laser auto-collimation device with large working distance in this embodiment is further provided with a wavefront detection system 7 and a wavefront compensation system 8;
[0086] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and a mirror deformation wavefront detector 73; the wavefront detection spectroscope 71 is arranged between the reflection mirror 3 and the measured object 5, and the air disturbance wavefront detects The detector 72 is arranged on the reflected light path of the wavefront detection beam splitter 71, and the mirror deformation wavefront detector 73 ...
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