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Portable high-precision laser long-working distance auto-collimation apparatus and method thereof

A portable, high-precision technology, applied in the field of precision measurement and optical engineering, can solve the problems that self-collimation and micro-angle measurement cannot be realized, the range should not be too large, and the reflected beam deviates from the entrance pupil, etc.

Active Publication Date: 2016-10-12
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;
[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement
[0010] The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

Method used

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  • Portable high-precision laser long-working distance auto-collimation apparatus and method thereof
  • Portable high-precision laser long-working distance auto-collimation apparatus and method thereof
  • Portable high-precision laser long-working distance auto-collimation apparatus and method thereof

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specific Embodiment 1

[0075] This embodiment is an embodiment of a portable high-precision laser self-collimation device with a large working distance.

[0076] The portable high-precision laser self-collimation device with large working distance in this embodiment has a schematic structural diagram as follows figure 2 shown. The self-collimation device includes a light source 1, a reflective collimating mirror 22, a reflective mirror 3, and a feedback imaging system 6. The reflective mirror 3 is provided with an angle adjustment measuring device 4; After the straight mirror 22 is collimated into a parallel beam, it is reflected by the mirror 3 and incident on the surface of the object to be measured 5; the beam reflected from the surface of the object to be measured 5 is reflected by the mirror 3 and then collected by the feedback imaging system 6 imaging;

[0077] The feedback imaging system 6 is arranged between the light source 1 and the reflective collimating mirror 22, including a first fe...

specific Embodiment 2

[0080] This embodiment is an embodiment of a portable high-precision laser self-collimation device with a large working distance.

[0081] The portable high-precision laser self-collimation device with large working distance in this embodiment has a schematic structural diagram as follows Figure 7 shown. On the basis of the specific embodiment 1, the portable high-precision laser auto-collimation device with large working distance in this embodiment is further provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0082] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflection mirror 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected light path of the wavefront detection beam splitter 71, and the mirror deformation wavefront detector 73 is arranged on...

specific Embodiment 3

[0084] This embodiment is an embodiment of a portable high-precision laser self-collimation device with a large working distance.

[0085] The portable high-precision laser self-collimation device with large working distance in this embodiment has a schematic structural diagram as follows Figure 8 shown. On the basis of the specific embodiment 1, the portable high-precision laser auto-collimation device with large working distance in this embodiment is further provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0086] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and a mirror deformation wavefront detector 73; the wavefront detection spectroscope 71 is arranged between the reflection mirror 3 and the measured object 5, and the air disturbance wavefront detects The detector 72 is arranged on the reflected light path of the wavefront detection beam splitter 71, and the mirror deformation wavefront detector 73 ...

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Abstract

The invention belongs to the technical field of precise measurement and the field of optical engineering, and concretely relates to a portable high-precision laser long-working distance auto-collimation apparatus and a method thereof. The apparatus is composed of a light source, a collimating mirror, a reflector and a feedback imaging system. The method comprises the following steps: the reflector is adjusted to make reflected light beams return to the center of the image plane of the feedback imaging system, and an angle deflection measuring device on the reflector is used to obtain the angle change of the surface of a measured object. The reflector is arranged on a traditional auto-collimation angle measurement apparatus, so the problem of unable measurement caused by deviation of the reflected lights of the measured object from the measurement system is avoided, thereby the auto-collimation working range is increased under a same working distance, or the working distance is increased under a same auto-collimation working range. The concrete design of the collimating mirror, the feedback imaging system and the reflector makes the apparatus have the advantages of small size, portability, high measurement precision, monitoring of the stability of monitored environment, and high measurement speed.

Description

technical field [0001] The invention belongs to the technical field of precision measurement and the field of optical engineering, in particular to a portable high-precision laser large working distance self-collimation device and method. Background technique [0002] In the field of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology under large working distances. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can perform surface angle measurement and circular indexing measurement; the maximum working distance From a few meter...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C15/00
CPCG01C15/004
Inventor 谭欣然朱凡王超谭久彬
Owner HARBIN INST OF TECH
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