EMI shielding film magnetic control winding coating machine

A technology of shielding film and coating machine, applied in the field of EMI shielding film magnetron winding coating machine, can solve the problem of inability to evaporate high-melting-point materials and multi-component materials, and achieve the improvement of the overall deposition rate, strong applicability, and flexible combination. Effect

Inactive Publication Date: 2016-10-12
GUANGDONG ZHENHUA TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The most commonly used method is resistance evaporation coating, which mainly evaporates low-melting point materials, such as pure aluminum. This method cannot evaporate high-melting point materials or composite multi-component materials.

Method used

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  • EMI shielding film magnetic control winding coating machine
  • EMI shielding film magnetic control winding coating machine
  • EMI shielding film magnetic control winding coating machine

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] Such as figure 1 As shown, a kind of EMI shielding film magnetron roll-to-roll coater of the present invention comprises vacuum chamber body 1, door body 2 and target chamber 3, and described vacuum chamber body 1 is provided with winding roll system 4 and ion Source 10, the target chamber is provided with a planar magnetron target system, and the winding roll system 4 includes a protective film winding roll 41, an unwinding roll 42, four guide rolls 43, a low-temperature coating roll, and a protective film wound sequentially. 44 and winding roll 45, the right side of the low temperature coating roll 44 is partially placed in the target chamber 3, the planar magnetron target system includes four target working sections 5, each target working section 5 is provided with a pair of The planar magnetron target 6, the adjacent target working area 5 is separated by the partition plate 7, and each planar magnetron target 6 is arranged around the low-temperature coating roll 44 ...

Embodiment 2

[0037] This embodiment is basically the same as Embodiment 1, the difference is that: there are four target working areas 5, and the two target operating areas 5 placed in the middle are air extraction compartments 5 without planar magnetron targets 6 installed. ', there are two planar magnetron targets 6 in the target working area 5 placed on both sides, so that the different gases in the front and back areas can be effectively blocked to achieve the effect of not affecting each other.

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Abstract

The invention belongs to the technical field of coating equipment, and specifically discloses an EMI shielding film magnetron winding coating machine, which includes a vacuum chamber body, a door body and a target chamber. The vacuum chamber is provided with a winding roller system, and the target chamber is provided with a flat surface. The magnetron target system, the low-temperature coating roller is partially placed in the target chamber, the planar magnetron target system includes several target working areas, at least one target working area is provided with several pairs of planar magnetron targets, and the adjacent targets work The intervals are separated by partition plates, and each planar magnetron target is arranged around the low-temperature coating roller and arranged equidistantly from the surface of the low-temperature coating roller. The coating machine can realize one-time filming and multi-target working at the same time, which can greatly improve the overall deposition rate, and can also meet the needs of coating multi-layer films of various materials at one time. In addition, it can also reach a lower temperature and effectively remove heat. , to ensure that the flexible substrate being coated will not be deformed by heat.

Description

technical field [0001] The invention belongs to the technical field of high-vacuum continuous winding coating equipment, and in particular relates to a magnetron winding coating machine for EMI shielding films. Background technique [0002] EMI is electromagnetic interference, which is electromagnetic waves emitted by electronic devices during operation, which interferes with nearby electronic components or devices. Usually, in order to ensure the normal operation of the device, these external influencing factors must be isolated. [0003] Eliminate electromagnetic interference, most commonly using electromagnetic shielding. At present, there are many methods of electromagnetic shielding, which can be as follows: metal braided sleeve, conductive paint or film, tin foil, copper paper or metal box. The above-mentioned shielding methods have a common feature, that is, a continuous conductive layer that passes electromagnetic waves through The ground wire leads to the ground, w...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56C23C14/35C23C14/54
CPCC23C14/56C23C14/352C23C14/541
Inventor 潘振强梁凯基
Owner GUANGDONG ZHENHUA TECH CO LTD
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