Optical add drop multiplexer based on antisymmetric multimode waveguide Bragg grating
A technology of optical add-drop multiplexer and waveguide grating, which is applied in the direction of wavelength division multiplexing system, multiplexing communication, optical multiplexing system, etc., which can solve the problem of high precision of manufacturing process and difficult wavelength selection , filter bandwidth and other problems, to achieve the effect of convenient low-cost manufacturing, easy integration and expansion, and simple device design structure
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[0043] Such as figure 1 , figure 2 with Figure 4 As shown, silicon-on-insulator (SOI) material with a top silicon thickness of 220 nm and a silicon oxide buried layer of 2 µm is used. After the wafer surface is cleaned, deep ultraviolet lithography or electron beam direct writing lithography is used to obtain silicon etching. Mask, through silicon dry etching, to produce a strip waveguide with a height of 220 nm, in which the width of the single-mode input waveguide and single-mode output waveguide is 600 nm, the width of the multi-mode waveguide is 1100 nm, and the width of the input gradient waveguide is 600 nm Change to 1100 nm, the change length is 100µm, the width of the down graded waveguide is changed from 100 nm to 450 nm, the change length is 100 µm, the interval between the input graded waveguide and the down graded waveguide is 100 nm, the output graded waveguide and the input graded waveguide structure The same, the upper graded waveguide and the lower graded w...
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