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Oblique-trapezoid motion transfer type precise piezoelectric stick-slip linear motor and driving method thereof

A technology of motion conversion and linear motor, applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, generators/motors, etc., can solve the problem of sawtooth-like unstable motion output and comprehensive control of friction Difficulties, limited output mechanical performance, etc., to achieve the effect of improving mechanical output characteristics, reducing displacement retraction rate, and improving output efficiency

Active Publication Date: 2016-08-03
CHANGCHUN UNIV OF TECH
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Problems solved by technology

[0004] In order to solve the technical problems of the existing piezoelectric stick-slip linear motors, such as the difficulty in comprehensive regulation of the friction force between the stator and the mover, the limited output mechanical performance, the generation of sawtooth-like unstable motion output, and the degradation of output performance, the present invention discloses A precision piezoelectric stick-slip linear motor with inclined trapezoidal motion conversion and its driving method

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  • Oblique-trapezoid motion transfer type precise piezoelectric stick-slip linear motor and driving method thereof
  • Oblique-trapezoid motion transfer type precise piezoelectric stick-slip linear motor and driving method thereof
  • Oblique-trapezoid motion transfer type precise piezoelectric stick-slip linear motor and driving method thereof

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specific Embodiment approach 1

[0024] Specific implementation mode one: combine Figure 1~Figure 9 This embodiment will be described. This implementation mode provides a specific implementation scheme of a precision piezoelectric stick-slip linear motor with inclined trapezoidal motion conversion. The inclined trapezoidal motion conversion precision piezoelectric stick-slip linear motor consists of a base 1 , a pre-pressure adjustment device 2 , an inclined trapezoidal stator 3 and a mover 4 .

[0025] The base 1 includes a base installation hole 1-1, a preloading device installation hole 1-2, a guide rail fixed installation contact surface 1-3 and a guide rail threaded installation hole 1-4. The base 1 can be made of high magnetic permeability stainless steel. The base installation hole 1-1 is a countersunk hole, which can fix the base 1 and other peripheral devices, and the pre-pressure adjustment device installation hole 1-2 is used for fixing the pre-pressure adjustment device 2. The fixed installati...

specific Embodiment approach 2

[0029] Specific implementation mode two: combination Figure 10 The figures illustrate the present embodiment. This embodiment provides a specific embodiment of a driving method for a precision piezoelectric stick-slip linear motor with inclined trapezoidal motion conversion. The driving method of a precision piezoelectric stick-slip linear motor with inclined trapezoidal motion conversion is as follows.

[0030] The composite excitation electric signal used in the driving method is compositely superimposed on the sawtooth driving wave in the rapid deformation stage of the stator by the friction regulation wave, the driving wave is a sawtooth wave, and the friction regulation wave is a sine wave. Specifically, the driving method can reduce the frictional resistance between the stator and the mover during the rapid deformation stage, suppress the generation of retreat motion, and improve the mechanical output performance. The period of sawtooth driving wave is T 1 , the exci...

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Abstract

Provided are an oblique-trapezoid motion transfer type precise piezoelectric stick-slip linear motor and a driving method thereof. The problem that for a current piezoelectric stick-slip linear motor, due to the fact that comprehensive regulation of friction force is difficult, the mechanical output characteristic is limited is solved. The motor is composed of a base, a pre-pressure adjustment device, an oblique-trapezoid stator and an oblique-trapezoid rotor, the stator adopts a symmetric flexible hinge structure to produce displacement amplification, lateral displacement is produced by means of nonuniform axial rigidity distribution of a semicircular drive foot, friction drive force is increased, and frictional resistance is reduced; meanwhile, a friction regulation wave is compositely overlaid in a sawtooth drive wave in the rapid deformation stage of the stator, the frictional resistance between the staror and the rotor in the rapid deformation stage is reduced, comprehensive regulation of the friction force is achieved, and the mechanical output characteristic of the linear piezoelectric motor is significantly improved. The oblique-trapezoid motion transfer type precise piezoelectric stick-slip linear motor has the advantages of being simple in structure, high in precision, large in stroke and the like, and an excellent application prospect in the micro-nano precision driving and positioning fields such as aerospace, optical precision instruments and semiconductor processing is achieved.

Description

technical field [0001] The invention relates to an oblique trapezoidal motion conversion precision piezoelectric stick-slip linear motor and a driving method thereof, belonging to the technical field of micro-nano precision driving and positioning. Background technique [0002] Piezoelectric stick-slip linear motor is a kind of piezoelectric stick-slip linear motor that uses the inverse piezoelectric effect of piezoelectric elements to excite the vibrator (or stator) to generate micro-vibration under the excitation of an asymmetric electrical signal, and realizes mechanical energy output through the frictional coupling between the vibrator and the mover. precision micro-nano actuators. According to different driving working principles, piezoelectric stick-slip linear motors are mainly divided into two categories: resonant piezoelectric motors (also called ultrasonic motors) and non-resonant piezoelectric motors (also called piezoelectric stick-slip motors). Compared with th...

Claims

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Application Information

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IPC IPC(8): H02N2/02H02N2/04H02N2/06
CPCH02N2/02H02N2/04H02N2/06
Inventor 程廷海何猛张邦成柳虹亮殷梦飞何璞
Owner CHANGCHUN UNIV OF TECH
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