Roll-to-roll continuous grapheme film growth device and technique

Abstract

The invention discloses a roll-to-roll continuous grapheme film growth device and technique. The roll-to-roll continuous grapheme film growth device comprises a machine body. The two ends of a workbench are provided with vacuum cavities correspondingly. A vacuum pipe is connected to the vacuum cavities. A radio-frequency plasma generator, a heating furnace and a liquid nitrogen cold trap are sequentially arranged at one side of one vacuum cavity. According to the device, roll-shaped copper foil is arranged in the vacuum cavities for roll-to-roll continuous preparation of large-area and high-quality grapheme. Compared with an existing method, the method for preparing the grapheme through the device has the advantages of being rapid and continuous; large-scale growth of the large-area and high-quality grapheme can be achieved.

Description

technical field [0001] The invention relates to a graphene growth furnace, in particular to a roll-to-roll continuous graphene film growth equipment and a growth process thereof. Background technique [0002] Large-scale CVD equipment has produced a 30-inch (diagonal about 76cm) graphene film. However, due to the limitation of the equipment, the preparation process still needs to be prepared once and then reloaded to prepare the next time. It is still impossible to achieve large-area, Continuous and rapid preparation of high-quality graphene. Large-scale roll-to-roll CVD equipment has produced graphene films with a length of more than 100 meters. However, since the process temperature of CVD growth of high-quality graphene is close to the melting point of copper foil, the copper foil itself can hardly bear it in the roll-to-roll CVD growth graphene equipment. Any tension, and it has a strong tendency to infiltrate, weld and adhere to the materials of common transmission str...

AI Technical Summary

Problems solved by technology

[0002] Large-scale CVD equipment has produced a 30-inch (diagonal about 76cm) graphene film. However, due to the limitation of the equipment, the preparation process still needs to be prepared once and then reloaded to prepare the next time. It is still impossible to achieve large-area, Continuous and rapid preparation of high-quality graphene

Large-scale roll-to-roll CVD equipment has produced graphene films with a length of more than 100 meters. However, since the process temperature of CVD growth of high-quality graphene is close to the melting point of copper foil, the copper foil itself can hardly bear it in the roll-to-roll CVD growth graphene equipment. Any tension, and it has a strong tendency to infiltrate, weld and adhere to the materials of common transmission structures such as metal mesh bags, graphite and quartz rollers. A slight mishandling will lead to tearing of the graphene grown on the surface of the copper foil Cracks and Wrinkles

The above characteristics pose a huge challenge to the winding and unwinding control of copper foil and the transmission structure under vacuum conditions in the roll-to-roll CVD graphene growth equipment.

At the same time, because the process pressure of roll-to-roll CVD growth belongs to low-pressure CVD, the grown copper foil needs to be cooled rapidly during winding, and the heat conduction under vacuum conditions is almost completely dependent on heat radiation, which causes the existing roll-to-roll CVD growth equipment to cool down. Low efficiency and difficult to adapt to the needs of high-speed and large-volume growth

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