In situ torque testing device and observation device for micro-nano scale materials

Abstract

The invention provides an in-situ torque testing device for micro-nano scale materials and an observing device. The in-situ torque testing device for micro-nano scale materials comprises a clamping unit, a loading unit and a signal detecting unit, wherein the clamping unit is used for clamping and fixing a tested sample (14) and comprises two chucks; the loading unit is used for driving the tested sample (14) to reverse, comprises a micro motor (1) for outputting torque and is connected with one end of the clamping unit; the signal detecting unit is used for detecting the magnitude of the torque applied to the tested sample (14) and is connected with the other end of the clamping unit. The in-situ torque testing device for micro-nano scale materials is small in size and simple in structure. The in-situ torque testing device for micro-nano scale materials also can be used together with a microscopic imaging instrument (such as a scanning electron microscope (SEM), an optical microscope (OM), and the like), so as to form the microstructure observing device.

Description

technical field [0001] The invention relates to the field of torsion test equipment, in particular to an in-situ torque testing device for micro-nano-scale materials, and a microscopic morphology observation device containing the in-situ torque testing device for micro-nano-scale materials. Background technique [0002] With the development of nanotechnology, micro-nano materials are widely used in aerospace, automotive industry, semiconductor, biomedicine, MEMS, polymer, solar energy / fuel cell chemical industry, petroleum, rock, microelectronics, microsensors, semiconductor materials, Automatic control, aerospace, automotive industry and machine tools. The microscopic mechanical properties of materials are quite different from the macroscopic classical mechanical properties. Among the many performance parameters of the micro-nano mechanical test of materials, the torsional mechanical performance test of materials is one of the very important test objects. [0003] In-situ...

AI Technical Summary

Problems solved by technology

However, the in-situ testing techniques and instruments at this stage mostly focus on the tensile and bending deformation of materials, and pay less attention to the torsion testing of materials.

The main reason is that the torsion test platform has strict requirements on the miniaturization, precision, and material assembly of the equipment, and it is necessary to ensure the electromagnetic compatibility and vacuum compatibility between the test device and the working cavity during the experiment. These reasons limit the micro-nano Rapid Development of Torsion Mechanics Testing Technology

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