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Quartz wafer grinding on-line frequency measurement method based on waveform matching method

A waveform matching and quartz wafer technology, applied in the direction of frequency measurement devices, etc., can solve the problems of unable to grind sand and monitor the state of the grinding disc surface, so as to prevent overclocking events and improve production efficiency.

Active Publication Date: 2016-05-18
RES INST OF ZHEJIANG UNIV TAIZHOU
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Problems solved by technology

However, the ALC system only provides the control strategy of "stopping at the grinding target frequency", and does not involve the monitoring of parameters such as grinding rate and frequency dispersion and the corresponding control strategy, which makes it unable to monitor the state of the grinding sand and the grinding disc surface

Method used

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  • Quartz wafer grinding on-line frequency measurement method based on waveform matching method
  • Quartz wafer grinding on-line frequency measurement method based on waveform matching method
  • Quartz wafer grinding on-line frequency measurement method based on waveform matching method

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Embodiment Construction

[0043] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0044] The frequency measurement and control method proposed by the present invention is aimed at the online frequency measurement system of quartz wafer grinding. The online frequency measurement system is used to obtain information such as the resonant frequency value, grinding rate, and dispersion of the wafer in the process of quartz wafer grinding in real time. Stop the grinder.

[0045] Quartz wafer grinding online frequency measurement system:

[0046] Quartz wafer grinding online frequency measurement system such as figure 1 shown. The online frequency measurement and control method proposed by the invention is applicable to the frequency measurement system built based on the system framework. Quartz chip online frequency measurement system consists of MCU, DDS frequency sweep module, power amplifier circuit module, π network circuit...

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Abstract

The invention discloses a quartz wafer grinding on-line frequency measurement method based on a waveform matching method. By adopting the method, the frequency from 5M to 70MHZ can be stably measured in real time in a quartz wafer grinding process. According to the invention, various states in the wafer grinding and production process are displayed and suggestions are provided, the grinding state of quartz wafers are monitored in real time in the on-line frequency measurement process, if abnormal conditions occurs, a grinding machine is stopped in real time, an over-frequency event is prevented, and a user can effectively improved the production efficiency according to the states displayed on a touch screen; a frequency hopping constraint strategy is used to thoroughly solve the problem of an ALC system that frequency measurement values hop in some frequency bands; in addition, diversified statistic parameters such as a wafer grinding real-time average frequency, a grinding speed and a scattering difference are provided, scientific bases are provided for grinding sand replacing and grinding disk maintenance, and the defect that the ALC system fails to monitor the state of the grinding machine is overcome.

Description

technical field [0001] The invention relates to an on-line frequency measurement method for quartz wafer grinding based on a waveform matching method. Background technique [0002] The electronic information industry is a pillar industry of the national economy, and quartz crystal oscillators play an extremely important role in the electronic information industry. China is a big producer of quartz crystal components, but there is still a large gap in output value and product quality compared with developed countries. The industry has developed very rapidly in recent years, and the demand for processing equipment and online high-precision measurement and control equipment in the production process of quartz crystal components is also increasing. [0003] Wafer grinding is an essential step in the production process of quartz crystal oscillators. Wafer electrical parameter testing is the key measurement and control technology in this step. Many domestic research institutions ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R23/02
CPCG01R23/02
Inventor 郭彬潘凌锋陈浙泊陈一信
Owner RES INST OF ZHEJIANG UNIV TAIZHOU
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