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Radio frequency micro-electro-mechanical system (MEMS) switch and fabrication method thereof

A switch and radio frequency technology, applied in the field of radio frequency MEMS switches and their manufacturing, can solve the problems of high driving voltage, poor reliability, and low life, and achieve the effect of reducing driving voltage, improving life and reliability, and low conductivity

Active Publication Date: 2016-05-11
BEIJING MXTRONICS CORP +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The technical problem solved by the present invention is: to overcome the deficiencies of the prior art, to provide a radio frequency MEMS switch and its manufacturing method, the radio frequency MEMS switch solves the problems of high driving voltage, low life and poor reliability of the existing switch

Method used

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  • Radio frequency micro-electro-mechanical system (MEMS) switch and fabrication method thereof
  • Radio frequency micro-electro-mechanical system (MEMS) switch and fabrication method thereof
  • Radio frequency micro-electro-mechanical system (MEMS) switch and fabrication method thereof

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Embodiment Construction

[0036] The present invention proposes a radio frequency MEMS switch, including: a substrate 2, a dielectric layer 3, a drive electrode 4, an isolation layer 5, a signal line input electrode 6, a columnar anchor point 7, two fixed beams 8 with turning structures, and a beam 9. Multi-contact system 11 and signal line output electrode 12 , ground line 13 and cap 14 . Such as figure 1 It is a structural schematic diagram of the radio frequency MEMS switch of the present invention, 1A is its side view, and 1B is its edge figure 1 Sectional view of the AB-A'B' section of A.

[0037] Wherein each fixed beam 8 comprises at least 6 turning parts, such as Figure 5 Shown is a structure of the fixed beam 8 of the present invention, wherein the turning part is a right angle, and a fixed beam has 7 right-angle turning parts, and the fixed beam is divided into 8 sections. The design of the turning structure reduces the elastic coefficient of the beam 9 .

[0038]There is a dielectric la...

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Abstract

The invention discloses a radio frequency micro-electro-mechanical system (MEMS) switch and a fabrication method thereof. The radio frequency MEMS switch is characterized by being of a silicon-silicon dual-layer structure and comprises a substrate, a dielectric layer, a driving electrode, an isolation layer, a signal line, a ground line and a cover cap, wherein the signal line comprises a signal line input electrode, a columnar anchor point, two fixed beams, a cross beam, a multi-contact system and a signal line output electrode, one end of each of the two fixed beams is fixed on the upper surface of the columnar anchor point, the other ends of the two fixed beams are connected with a fixed end of the cross beam, the multi-contact system is arranged below a free end of the cross beam, the driving element is arranged below the cross beam, a groove and through holes are formed in a silicon cap, and the positions of the through holes are in correspondence to the signal line input electrode, the signal line output electrode, the ground line and the driving electrode. With the radio frequency MEMS switch disclosed by the invention, the driving voltage of the switch is effectively reduced, the service lifetime of the contact point is prolonged, the cross beam is protected by the silicon cap so as not to be affected by an environment, and the reliability of the switch is improved.

Description

technical field [0001] The invention relates to a radio frequency MEMS switch and a manufacturing method thereof, belonging to the technical field of radio frequency MEMS. Background technique [0002] Radio Frequency Micro-Electro-Mechanical System (RFMEMS for short) is an important branch of MEMS technology, and it is also a research hotspot in the field of MEMS since the 1990s. RFMEMS refers to the use of MEMS technology to manufacture RF devices, components or subsystems to realize the control of RF signals. RFMEMS switches use mechanical motion to control the on-off of radio frequency signal transmission, and are the most important basic components in RFMEMS devices and systems. RFMEMS switches show great application prospects in the microwave field due to their inherent near-zero driving power consumption, low insertion loss, linearity and low cross-modulation loss. It can be used in band switching switch, bypass switch, reconfigurable antenna, phased array communica...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01H59/00H01H49/00
CPCH01H49/00H01H59/0009
Inventor 李光北张富强杨静王碧王成杰孟美玉孙俊敏刘尚禹
Owner BEIJING MXTRONICS CORP
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