A vertical heat treatment device

Abstract

The invention discloses a vertical heat treatment device, which comprises a wafer boat, an insulation barrel and a process door, wherein the insulation barrel comprises a base, upright posts, a quartz housing and multiple groups of male tabs. The vertical heat treatment device can effectively fix various components of the wafer boat and the insulation barrel so that various components of the water boat and the insulation barrel have relatively good concentricity and stability in a reaction chamber; simultaneously accurate positioning of the male tabs of the insulation barrel can be ensured; the male tabs of the insulation barrel can be replaced according to different process requirements; the equipment cost is reduced; the compatibility of the insulation barrel is improved; and thevertical heat treatment device has the advantages of being reasonable in structure and convenient to install. Meanwhile, the quantity, the diameters and the intervals of the male tabs of the insulation barrel can be adjusted to adapt to the temperature requirements of different processes, so that the influence on local wafers caused by a temperature change is improved; the uniformity of a temperature field of the reaction chamber is ensured; and the film thickness uniformity of wafer reaction is improved.

Description

technical field [0001] The invention relates to the technical field of heat treatment of semiconductors, and more specifically relates to a vertical heat treatment device. Background technique [0002] In the semiconductor manufacturing process, in order to implement multiple heat treatment processes such as CVD, oxidation, and diffusion on the processed wafers, such as semiconductor wafers, to achieve different process purposes, a device that can simultaneously perform batch heat treatment on multiple wafers is required . see figure 1 , most of the existing batch heat treatment devices have a furnace body 5, a reaction chamber 3, a wafer boat 4, a heat preservation barrel 2, and a process gate 1, which is used to carry a wafer boat (usually more than 100 wafers) 4 is arranged on the heat preservation barrel 2, and the heat preservation barrel 2 is installed on the process door 1, and the lifting system (not shown in the figure) drives the process door 1 to realize the lif...

AI Technical Summary

Problems solved by technology

[0003] In the existing process, the crystal boat is made of quartz material, which is expensive. With the development of the process, the manufacturing cost of silicon wafers is getting higher and higher. Correspondingly, higher requirements are put forward for the stability of the wafer process.

In the existing vertical furnace equipment, there are no particularly effective measures for fixing the crystal boat and the heat preservation barrel, and the ability to resist equipment vibration or earthquake is not high, and it is easy to cause the crystal boat and heat preservation barrel to shake or even fall when vibrating , resulting in major economic losses such as batch wafer damage

In order to prevent the shaking of the crystal boat and the heat preservation barrel, the two parts of the crystal boat and the heat preservation barrel are often fixed, but the fixing effect is often not ideal, and the existing fixing methods are often aimed at the integral heat preservation barrel. The parts of the assembled heat preservation barrel cannot be fixed. When vibration occurs, the parts of the assembled heat preservation barrel often collide with each other and damage the heat preservation barrel, which eventually causes the wafer boat to fall and damage the wafer.

[0004] As known in the art, when the same vertical furnace equipment is used for processes at different temperatures, the temperature at the furnace mouth of the reaction chamber is also different. Using the same heat preservation bucket will cause a large change in the temperature at the bottom of the reaction chamber, which will affect the silicon Therefore, in the prior art, different equipment or different insulation barrels need to be prepared for different processes, but this method greatly increases the cost of equipment

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