Resonator nano-beam parallel plate electrostatic control device and control method thereof

Abstract

The invention discloses a resonator nano-beam parallel plate electrostatic control device and a control method thereof. The resonator nano-beam parallel plate electrostatic control device comprises three parts: a driving device, a signal extraction device and a control device. The control method comprises the following steps of: 1, determining a driving clearance condition of nano-beam linear-like stable vibration; and 2, determining a nonlinear feedback control voltage gain gf of a voltage amplifier. The resonator nano-beam parallel plate electrostatic control device utilizes the characteristic that a resistance of a graphene thin film is changed along with deformation of the graphene thin film, is applied to vibration control of a nano-beam and a driving electrode as a displacement sensor, and solves the problem of failure of an existing NEMS (Nano Electro Mechanical System) device, which is caused by harmful nonlinear influence generated due to electrostatic driving.

Description

technical field [0001] The invention relates to a resonator nano-beam parallel plate electrostatic control device and a control method thereof, belonging to the technical field of electronic devices. Background technique [0002] The nonlinear effect of nanobeam vibration is a problem that restricts the wide application of nanoelectromechanical system (NanoElectromechanicalSystem, NEMS) devices. In NEMS devices, the mechanically moving components can usually be simplified as nano-beams. Under the coupling of parametric excitation and external excitation, the response of the nano-beam electrostatically coupled nonlinear system presents relatively rich nonlinear dynamic characteristics, specifically manifested as non-linear The linear system response shows a complex process of periodic, quasi-periodic and chaotic motion alternately evolving with the change of system parameters, and it is also prone to nonlinear phenomena such as spring hardening or softening, sudden jump, hyst...

AI Technical Summary

Problems solved by technology

In NEMS devices, the mechanically moving components can usually be simplified as nano-beams. Under the coupling of parametric excitation and external excitation, the response of the nano-beam electrostatically coupled nonlinear system presents relatively rich nonlinear dynamic characteristics, specifically manifested as non-linear The linear system response shows a complex process of periodic, quasi-periodic and chaotic motion alternately evolving with the change of system parameters, and it is also prone to nonlinear phenomena such as spring hardening or softening, sudden jump, hysteresis, suction instability, frequency drift, etc.

Due to the small scale and small damping characteristics of the nanobeam, the structural vibration is easy to enter a nonlinear vibration state. On the other hand, the non-planar vibration of the space leads to the resonant frequency shift, which will lead to the instability of the structural vibration of the resonator nanobeam. and the offset of the resonance point, which in turn affects the matching of the best frequency and the working stability of electronic equipment

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