A resonator nanobeam electrostatic control device

A static control and control device technology, applied in the direction of electrical components, impedance networks, etc., can solve problems such as resonance point shift, structural vibration instability, affecting the stability of the matching electronic equipment with the best frequency, etc., to achieve small device size Effect

Inactive Publication Date: 2017-12-05
SHANDONG UNIV OF TECH
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  • Abstract
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Problems solved by technology

[0004] Due to the small scale and small damping of the nanobeam, the structural vibration is very easy to enter a nonlinear vibration state. On the other hand, the non-planar vibration of the space leads to the migration of the resonant frequency, which will lead to the instability and resonance of the structural vibration of the resonator nanobeam. The offset of the point, which in turn affects the matching of the best frequency and the stability of the electronic equipment, therefore, it is necessary to control the nonlinear vibration resonance of the nanobeam

Method used

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  • A resonator nanobeam electrostatic control device
  • A resonator nanobeam electrostatic control device
  • A resonator nanobeam electrostatic control device

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Embodiment Construction

[0024] Below in conjunction with accompanying drawing and embodiment the present invention is further described: as figure 1 with figure 2 As shown, a resonator nanobeam electrostatic control device consists of three parts: a driving device, a control device and a signal extraction device. The driving device includes a signal source 1, a driving electrode 2 and a nanobeam 3, wherein one end of the signal source 1 is connected to a driving Electrode 2, the other end is connected to the nano-beam 3, and the driving electrode 2 is located below the nano-beam and parallel to the nano-beam, the signal source is connected in series with the driving electrode and the nano-beam; the signal source generates an AC voltage signal V=V 0 sin(ωt), where V is the driving voltage, V 0 is the amplitude of the driving voltage, ω is the frequency of the driving signal, t is the time, and the simple harmonic vibration generated by the nanobeam is In the formula, y represents the vibration dis...

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Abstract

The invention discloses a nano-beam electrostatic control device for a resonator. The device is composed of a drive device, a signal extraction device and a control device. The graphite The voltage signal changed by the olefin film sensor is used as the control input signal, and the nonlinear vibration of the nanobeam is controlled by the axial control force generated by the axial parallel plate controller. The purpose of the present invention is to avoid the harmful nonlinear phenomenon in the electrostatic driving of the resonator nano-beam, so that the vibration of the nano-beam is in a linear stable vibration.

Description

technical field [0001] The invention relates to a resonator nano-beam electrostatic control device, which belongs to the technical field of electronic devices. Background technique [0002] Controlling the nonlinear effect of nanobeam vibration is a difficult problem that restricts the wide application of Nano Electromechanical System (NEMS) devices. [0003] In NEMS devices, the mechanically moving components can usually be simplified as nano-beams. Under the coupling effect of parameter excitation and external excitation, the nonlinear system response of nano-beam electrostatic coupling presents relatively rich nonlinear dynamic characteristics, which are specifically expressed as the system response With the change of system parameters, it presents a complex process of periodic, quasi-periodic and chaotic motion, and is also prone to nonlinear phenomena such as spring hardening or softening, sudden jump, hysteresis, suction instability, and frequency drift. [0004] Due ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H03H9/24H03H9/02
Inventor 刘灿昌岳书常巩庆梅刘文晓周继磊
Owner SHANDONG UNIV OF TECH
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