Resonator nano-beam electrostatic attraction control system and control method thereof

Abstract

The invention discloses a resonator nano-beam electrostatic attraction control system and a control method thereof. The system includes three parts: a drive device, a signal extraction device and a control device. The control method includes the following steps: 1) determining the main resonance peak amplitude of the nano-beam; 2) determining the critical deflection of the nano-beam to attract; 3) determining the critical voltage of the nano-beam to attract; 4) determining the driving voltage when the nano-beam is attracted to the base electrode the pull-in frequency. The invention utilizes the characteristic that the resistance of the graphene film changes with its deformation, and is used as a displacement sensor device for the pull-in control of the nano-beam and the drive electrode, and solves the problem of the pull-in effect of the existing NEMS device due to the pull-in effect of the nano-beam and the drive electrode. failure problem.

Description

technical field [0001] The invention belongs to the technical field of industrial control, and in particular relates to a resonator nano-beam electrostatic attraction control system and a control method thereof. Background technique [0002] At present, the nanobeam pull-in effect (pull-in) is a difficult problem that restricts the wide application of NEMS (NanoElectromechanical System) devices. In NEMS devices, the components that do mechanical movement can usually be simplified as nano-beams. When the lower surface of the nano-beams and the upper surface of the substrate are close to each other, on the one hand, the interaction force of the structural parts such as the electrostatic force on the nano-beams is greater than that on the nano-beams. The elastic force is more significant, and the electrostatic force on the nanobeam is inversely proportional to the square of the distance between the nanobeam and the driving electrode. When the distance between the nanobeam and t...

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Problems solved by technology

[0003] The object of the present invention is to provide a resonator nano-beam electrostatic attraction control system and its control method that can solve the problem of nano-beam attraction effect. (Kim K S, Zhao Y, Jang H, et al. Large-scale pattern growth of graphemefilms for stretchable transparent electrodes. Nature, 2009, 457:706-709) extracted the vibration signal of the nanobeam, and used the signal as a control signal to carry out the nanobeam Vibration control to solve the problem of vibration absorption of nano-devices

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