Heating device for evaporation and evaporation equipment

Abstract

The invention discloses a heating device for evaporation and evaporation equipment, and relates to the field of display device manufacturing. The heating device for evaporation and the evaporation equipment can solve the problems that existing evaporation equipment is not uniform in heating, evaporation material is easily sprayed, performance deterioration of the evaporation material occurs easily, and stabilization is difficult in the process of adjusting the evaporation rate. The heating device for evaporation comprises a crucible, a movable heating unit, a weighing sensing device and a controller; the crucible is used for containing the raw evaporation material; the movable heating unit is arranged outside the crucible and is higher than the raw evaporation material in the evaporation process; the weighing sensing device is arranged below the crucible and is used for weighing the crucible and the raw evaporation material in the crucible and outputting the weight data; the controller is used for receiving the weight data output by the weighing sensing device, the liquid level height of the raw evaporation material in the crucible can be calculated according to the weight of the crucible and the raw evaporation material in the crucible, and the movable heating unit can be controlled to reach the height of the raw evaporation material according to the liquid level height.

Description

technical field [0001] The invention relates to the field of display device manufacture, in particular to a heating device and evaporation equipment for evaporation. Background technique [0002] Organic materials are an important guarantee for the stability of OLED (Organic Light-Emitting Diode, organic electric laser display) components. At present, large-generation lines are formed by evaporation, which requires the evaporation heating system to maintain a stable plating rate while maintaining The material properties prevent it from deteriorating due to heat. [0003] Existing OLED line source evaporation such as figure 1 As shown, the evaporation raw material is placed in the crucible 10, and the heating source is the heating wire 11 wound and fixed outside the crucible 10. During operation, the evaporation raw material is heated and vaporized and escapes from the nozzle 12 to form a film on the substrate. On the one hand, this overall heating design improves the overa...

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Problems solved by technology

[0005] The invention provides a heating device and evaporation equipment for evaporation, which solves the problems that the existing evaporation equipment is unevenly heated, the evaporation material is easy to spray, the performance is easy to deteriorate, and the adjustment of the evaporation deposition rate is not suitable for stability.

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