Seawater conductivity sensor based on MEMS silicone-glass bonding process

Abstract

The invention discloses a seawater conductivity sensor based on an MEMS silicone-glass bonding process. The seawater conductivity sensor comprises an insulating substrate, four metal electrodes and a filter device. The filter device is in a round cap shape and comprises a hemisphere part and an annular edge part. A filter hole array is formed in the top of the hemisphere part. The filter device is fixed to the upper end face of the insulating substrate through the annular edge part. The cavity formed between the filter device and the insulating substrate serves as a conductance cell. The four metal electrodes are all arranged on the portion, in the conductance cell, of the insulating substrate and connected with an external test circuit through connection leads respectively. Compared with the prior art, the seawater conductivity sensor has the advantages that the defects that existing MEMS conductivity sensors are poor in anti-pollution capacity and low in measurement accuracy are overcome, the structure is simple, the size is small, the power consumption is low, cost is low, universality is high, and real-time and high-accuracy seawater conductivity measurement can be conveniently achieved.

Description

technical field [0001] The invention belongs to the field of micro-electro-mechanical system manufacturing, is suitable for marine measurement applications, and is especially suitable for real-time high-precision seawater conductivity measurement. It relates to a seawater conductivity sensor with a filter device, especially to a MEMS silicon-glass based sensor. Seawater conductivity sensor with bonding process. Background technique [0002] At present, ocean observation has been receiving extensive attention. Seawater conductivity is the most basic physical element of ocean water. Various phenomena and processes in the ocean, the survival and reproduction of marine organisms, and human maritime activities, including maritime military activities, are almost All are directly or indirectly related to the temporal and spatial distribution of seawater conductivity. [0003] In the prior art, the special testing equipment used for seawater conductivity measurement is expensive, b...

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Problems solved by technology

[0004] The problem to be solved in the present invention is that the above-mentioned existing seawater conductivity measurement equipment is expensive, bulky, and high in measurement cost; the existing MEMS conductivity sensor has poor anti-pollution ability, has measurement errors, and has low measurement accuracy. , to limit its lack of observation in the ocean, and provide a MEMS-based silicon-glass bonding process with simple structure, small size, convenient operation, low cost, fast measurement speed, strong anti-pollution ability, and high measurement accuracy seawater conductivity sensor

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