An acceleration sensor device based on symmetric graphene nanoribbons

A graphene nanoribbon, acceleration sensing technology, applied in the field of sensors, can solve the problems of low sensitivity and long response time

Inactive Publication Date: 2017-08-15
GUANGXI NORMAL UNIV
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  • Abstract
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  • Claims
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Problems solved by technology

This device can not only make up for the shortcomings of MEMS sensors limited by the external environment and their own properties, but also improve the long response time and low sensitivity of traditional microring sensors.

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  • An acceleration sensor device based on symmetric graphene nanoribbons

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Embodiment

[0017] refer to figure 1 , a kind of acceleration sensing device of symmetric graphene nanoribbon, comprises the base layer 1 of bottom layer, is provided with the first strip graphene nanoribbon 3 and the second strip graphite of same size symmetrical arrangement on the surface layer of base layer 1 Graphene nanobelt 4, the first strip-shaped graphene nanobelt 3, and the second strip-shaped graphene nanobelt 4 are provided with a micro-nano optical fiber straight waveguide 2.

[0018] The base layer 1 is an SOI base layer.

[0019] The first strip-shaped graphene nanoribbon 3 and the second strip-shaped graphene nanoribbon 4 form a symmetrical surface plasmon waveguide structure of graphene-dielectric-graphene, so that the output signal resonance waveguide and device sensitivity can be controlled by controlling the properties of the fiber medium .

[0020] A buried oxide layer is introduced between the top silicon layer of SOI and the back substrate in the base layer 1, and...

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Abstract

The invention discloses an acceleration sensing device based on symmetrical graphene nanobelts. The acceleration sensing device is characterized by comprising a base layer at the bottom layer; a first strip graphene nanobelt and a second strip graphene nanobelt that are of the same size and are arranged symmetrically are arranged on the upper surface layer of the base layer; and micro-nano fiber straight waveguide is arranged between the first strip graphene nanobelt and the second strip graphene nanobelt. The first strip graphene nanobelt and the second strip graphene nanobelt form a graphene-medium-graphene symmetrical surface plasma waveguide structure. The device can adjust the transmission characteristic of a surface plasma mode by adjusting the thickness of the optical fiber waveguide, thereby controlling the peak of resonant wavelength of an output signal so as to control the sensitivity of a sensor. The device overcomes the defect that the sensor of a microelectronic mechanical system is limited by external environment and self attributes, and solves the problems of long response time and low sensitivity of conventional micro ring sensors.

Description

technical field [0001] The invention relates to sensor technology, in particular to an acceleration sensing device of a symmetrical graphene nanobelt. Background technique [0002] At present, MEMS (Micro-Electro-Mechanical System, MEMS for short) sensors are developing in the direction of miniaturization and high density. Among them, MEMS accelerometer is a relatively successful direction among all MEMS sensors, and it has been realized in the military. application of strategic missiles. In engineering, the accuracy of the MEMS acceleration sensor can reach 10 -4 The magnitude of g. With the rapid development of photonic integrated circuits, micro-opto-electromechanical systems (MOEMS) completely integrate MEMS structures with micro-optical devices, semiconductor lasers, and photodetection devices. MOEMS obviously inherits the mature manufacturing process of MEMS, and can also give full play to the advantages of high speed and low power consumption of optical devices. A...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B7/02G01P15/093
Inventor 朱君徐汶菊秦柳丽宋树祥傅得立
Owner GUANGXI NORMAL UNIV
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