Heterojunction solar cell and preparation method thereof

Abstract

The invention discloses a heterojunction solar cell and a preparation method thereof, and aims at removing contamination and the oxide layer on the surface of a crystalline silicon wafer and silicon thin film layers in the transmission process so that passivation quality of the surface of the crystalline silicon wafer is enhanced and the fill factor and conversion efficiency of the cell are enhanced. The preparation method of the heterojunction solar cell comprises the steps that a first silicon thin film layer is deposited on the surface of the first side of the crystalline silicon wafer, and a second silicon thin film layer is deposited on the surface of the second side of the crystalline silicon wafer; and the first silicon thin film layer and the surface of the second side of the crystalline silicon wafer are cleaned before deposition of the second silicon thin film layer on the surface of the second side of the crystalline silicon wafer, and / or the first silicon thin film layer and the second silicon thin film layer are cleaned after deposition of the second silicon thin film layer on the surface of the second side of the crystalline silicon wafer.

Description

technical field [0001] The invention relates to the technical field of heterojunction solar cells, in particular to a heterojunction solar cell and a preparation method thereof. Background technique [0002] With the development of the photovoltaic industry and its market, the development of high-efficiency, low-cost heterojunction solar cells has become a major research direction. Hydrogenated amorphous silicon (a-Si:H) / crystalline silicon (c-Si) heterojunction solar cells combine the advantages of crystalline silicon and thin-film silicon technologies. It has the advantage of mobility, and has the characteristics of simple preparation process and high conversion efficiency. [0003] The existing manufacturing process of heterojunction solar cells is as follows: figure 1 As shown, it includes: crystalline silicon wafer texture cleaning 102, first intrinsic layer I layer deposition 104, doped layer P (or N) layer deposition 106, second intrinsic layer I layer deposition 10...

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Problems solved by technology

[0003] The existing manufacturing process of heterojunction solar cells is as follows: figure 1 As shown, it includes: crystalline silicon wafer texture cleaning 102, first intrinsic layer I layer deposition 104, doped layer P (or N) layer deposition 106, second intrinsic layer I layer deposition 108, doped layer N ( or P) layer deposition 110, transparent conductive film deposition 112, screen printing 114, annealing 116, wherein, in the deposition process, the crystalline silicon wafer needs to be transferred to different types of thin film deposition chambers, and the crystalline silicon wafer It will be in contact with the tray or substrate, and the impurities or pollutants on the tray or substrate are easy to stick to the crystalline silicon wafer, thereby contaminating the crystalline silicon wafer and reducing the passivation quality of the surface of the crystalline silicon wafer; at the same time, during the transfer During the process, the crystalline silicon wafer is exposed to the air, which is easily oxidized and produces an oxide layer on the surface of the crystalline silicon wafer, which reduces the passivation quality of the surface of the crystalline silicon wafer, thereby reducing the fill factor of the battery and reducing the yield of the battery

[0004] To sum up, in the existing manufacturing process of silicon-based heterojunction solar cells, during the deposition process, when the crystalline silicon wafer is transported between multiple deposition chambers, it is in contact with the tray or the substrate, which is easy to be stained. Pollution, and exposed to the air is easily oxidized to form an oxide layer, which reduces the passivation quality of the surface of the crystalline silicon wafer, thereby reducing the fill factor of the battery, resulting in a decrease in the yield of the battery

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