Method and device used for preventing inner part of camera lens from atomization

Abstract

The invention discloses a method and a device used for preventing an inner part of a camera lens from atomization. The method comprises the following steps: determining an atomization position of the inner part of the camera lens; and introducing clean gas into the atomization position to remove impure gas at the atomization position of the camera lens. With the adoption of the method and device used for preventing the inner part of the camera lens from atomization, the transparency of the camera lens is effectively improved so that the camera lens does not need to be usually replaced, cleaned and maintained; and on the one hand, the productivity in a photoetching production process is improved, and on the other hand, the service life of the camera lens can be prolonged and the production cost is greatly reduced.

Description

Technical field [0001] The invention belongs to the technical field of liquid crystal display, and specifically relates to a method and a device for preventing fogging inside a lens. Background technique [0002] In recent years, small and medium-sized liquid crystal displays have developed rapidly. During the production of the array layer, multiple photolithography processes are required. The lens of the exposure machine is used to emit ultraviolet light. The ultraviolet light transmits the image information on the film or other transparent bodies. Transfer to the array substrate coated with photosensitive material to complete the multi-channel photolithography process of the array layer. [0003] However, because the TFTLCD factory environment usually contains organic matter (VOC) particles and ammonium cations (NH4 + ) Particles, the exposure machine lens storage environment requires VOC concentration to be less than 200ppb, and the VOC concentration of the G8.5 generation TFTLC...

AI Technical Summary

Problems solved by technology

[0003] However, since the TFTLCD factory environment usually contains organic matter (VOC) particles and ammonium positive ions (NH4 + ) particles, the environment where the exposure machine lens is stored requires a VOC concentration of less than 200ppb, and the VOC concentration of the G8. Particle accumulation is formed on the lens of the exposure machine, resulting in a decrease in glass transparency, that is, lens fogging occurs

On the one hand, the fogging of the lens of the exposure machine can lead to a reduction in the life of the light source and a loss of production capacity; on the other hand, it will greatly increase the replacement of the light source and the cost of cleaning and maintenance

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