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Color optical filter insensitive to incident angle and preparation method for the same

An incident angle and filter technology, applied in optics, optical components, instruments, etc., to achieve the effect of cost reduction, low cost and simple preparation

Active Publication Date: 2015-12-09
上海高能煜镀科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Optical filters based on the MDM structure have been proven to be angle-insensitive. However, due to the requirement that the dielectric constant of the dielectric film and the metal film material have opposite positive and negative requirements in the working band, the commonly used dielectric film material can only work in a single layer as a dielectric layer. resonance wavelength

Method used

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  • Color optical filter insensitive to incident angle and preparation method for the same
  • Color optical filter insensitive to incident angle and preparation method for the same
  • Color optical filter insensitive to incident angle and preparation method for the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1～5

[0038] The metal film material is Ag; the dielectric film material is silicon-rich silicon oxide (SiOx)

[0039] Such as figure 1 As shown, a color filter that is not sensitive to the incident angle is composed of a substrate 1, and a metal film 2 (Ag), a dielectric film 3 (silicon-rich silicon oxide (SiOx)) and a metal film 4 ( Ag) composition, the dielectric constant of the dielectric film and the metal film material in the working band are opposite in positive and negative, and the absolute value is the same, based on the characteristics of adjustable refractive index of SiOx, the central wavelength of the color filter that is not sensitive to the incident angle Can cover the entire visible light band.

[0040] A method for preparing a color filter that is not sensitive to an incident angle, comprising the following steps,

[0041] 1) For the color filter expected to have a specific central wavelength, the corresponding thickness of the dielectric film SiOx, the thickness...

Embodiment

[0046] Embodiment parameter is as follows table 1:

[0047] Table 1

[0048]

[0049] Angle-insensitive filters with 5 different resonance wavelengths can be produced according to the parameters shown in the table above.

[0050] Carry out P polarized light transmission experiment to the optical filter that embodiment 1-5 prepares respectively, the P polarized light transmission spectrogram that obtains sees Figure 3-7 ,in image 3 It is the P polarized light transmission spectrum figure corresponding to embodiment 1, Figure 4 It is the P polarized light transmission spectrum figure corresponding to embodiment 2, Figure 5 It is the P polarized light transmission spectrum figure corresponding to embodiment 3, Figure 6 It is the P polarized light transmission spectrum figure corresponding to embodiment 4, Figure 7 It is the P polarized light transmission spectrum figure corresponding to embodiment 5;

[0051] Carry out S polarized light transmission experiment to t...

Embodiment 6-11

[0054] see Figure 13 , choose silicon-rich silicon nitride SiNy as the dielectric thin layer material; Ag metal thin film material;

[0055] By using a method similar to that of Examples 1-5 and carrying out Examples 6-11 according to the parameters shown in Table 2, another 6 angle-insensitive filters with different resonance wavelengths can be produced.

[0056] Table 2

[0057]

[0058] Carry out P polarized light transmission experiment to the optical filter that embodiment 6-11 prepares respectively, the obtained P polarized light transmission spectrogram sees Figure 14-19 ,in Figure 14 It is the P polarized light transmission spectrum figure corresponding to embodiment 6, Figure 15 It is the P polarized light transmission spectrum figure corresponding to embodiment 7, Figure 16 It is the P polarized light transmission spectrum figure corresponding to embodiment 8, Figure 17 It is the P polarized light transmission spectrum figure corresponding to embodiment...

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Abstract

The invention discloses a color optical filter insensitive to an incident angle and a manufacture method thereof. The color optical filter comprises a substrate; a metal film, a medium film and a metal film are successively arranged on the substrate; the three layers of films constitute a harmonic structure; the material of the medium film is made of the silicon-enriched silicon oxide SiOx or silicon-enriched silicon nitride SiNy, wherein the value ranges of the x and the y are as follow:0<x&1t,0<y*&1t;and 4 / 3, The manufacture method for the color optical filter insensitive to the incident angle is simple in preparation, low in cost, and applicable to mass production and batch production. The invention is hopefully and widely applied in the fields of liquid crystal display, color printing, sensor detection, anti-counteracting, etc.

Description

technical field [0001] The invention relates to an optical element, in particular to a color filter insensitive to an incident angle and a preparation method thereof, which can be applied to the fields of liquid crystal display, color printing, sensory detection, anti-counterfeiting and the like. Background technique [0002] Angle-insensitive color filters are widely used in image sensors, liquid crystal displays, and solar cells. Color filters have evolved from chemical dye filters and traditional dielectric thin film filters to today's microstructure grating filters. Although their performance has been continuously improved, they still have obvious deficiencies. Chemical dye filters have disadvantages such as poor quality and fading under long-term ultraviolet light irradiation. Traditional dielectric thin film filters do not have angle tolerance characteristics, and spectral blue shift occurs when light is obliquely incident. Electron beam exposure technology is used in...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/28
Inventor 沈伟东毛克宁杨陈楹章岳光刘旭
Owner 上海高能煜镀科技有限公司
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