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Evaluation Method for Surface Defects of Spherical Optical Components

A technology for spherical optics and defect evaluation, which is applied in the direction of optical devices, material analysis through optical means, scientific instruments, etc., can solve problems such as human eye fatigue and the inability to give quantitative descriptions of defect information, and achieve reliable numerical basis, Improvement of detection efficiency and detection accuracy

Active Publication Date: 2018-01-30
ZHEJIANG UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The traditional detection method for spherical optical component defects is mainly the visual method, which uses strong light to illuminate the spherical surface, and the human eye uses reflected light and transmitted light to observe from different directions. The visual method is greatly affected by the proficiency of the inspector, and subjectivity Strong, and long-term detection will cause human eye fatigue, and at the same time cannot give a quantitative description of defect information

Method used

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  • Evaluation Method for Surface Defects of Spherical Optical Components
  • Evaluation Method for Surface Defects of Spherical Optical Components
  • Evaluation Method for Surface Defects of Spherical Optical Components

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Embodiment 1

[0054] Below, embodiment 1 of the present invention will use Figure 1-9 to describe in detail.

[0055] The method for evaluating the surface defect of a spherical optical element specifically includes the following steps:

[0056] Step 1. When the spherical optical element 201 is imaged on the image plane through micro-scattering dark field imaging, the obtained imaging sub-aperture image is a two-dimensional image. Since information compression along the optical axis of imaging occurs during the optical imaging process, three-dimensional reconstruction of the spherical surface must first be performed to correct the information compression along the optical axis of imaging caused by surface defects of the spherical optical element 201 through optical imaging.

[0057] Step 2. The three-dimensional sub-aperture image is obtained after three-dimensional reconstruction of the spherical surface. In order to facilitate feature extraction, the information of the three-dimensional...

Embodiment 2

[0095] Below, embodiment 2 of the present invention will combine Figure 10 to describe in detail. In Example 2, a method of evaluating a surface defect of a spherical optical element when evaluating a small-diameter spherical optical element will be described.

[0096] The characteristic of the small-aperture spherical optical element discussed in this embodiment is that the full-aperture imaging of the entire surface of the small-aperture spherical optical element can be obtained only by performing microscopic scattering dark-field imaging on a sub-aperture at the apex of the spherical surface. Therefore, the corresponding defect evaluation method is also simpler than that in Embodiment 1, and the spherical defect information can be obtained by processing the sub-aperture image through image processing and defect calibration.

[0097] The sub-aperture image is processed through image processing and defect calibration to obtain spherical defect information, see Figure 10 ,...

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Abstract

The invention discloses a method for evaluating surface defects of a spherical optical element. The invention is based on the principle of micro-scattering dark-field imaging, scans the sub-aperture image on the surface of the spherical optical element, and then obtains surface defect information by using an image processing method. The invention makes full use of global correction of spherical sub-aperture images, three-dimensional splicing, two-dimensional projection, digital feature extraction, etc. to evaluate spherical defects. Using the defect calibration data, the size and position information of the defect is given quantitatively. The invention realizes automatic quantitative detection of surface defects of spherical optical elements, greatly improves detection efficiency and detection accuracy, avoids the influence of personal subjective factors on detection results, and finally provides reliable numerical basis for the use and processing of spherical optical elements .

Description

technical field [0001] The invention belongs to the technical field of machine vision detection, and in particular relates to a surface defect evaluation method of a spherical optical element. Background technique [0002] Spherical optical elements are widely used in large-aperture space telescopes, inertial confinement fusion (ICF) systems, and high-energy laser systems. Unnecessary scattering and diffraction will also occur in the system, resulting in energy loss. This energy loss may also cause secondary damage due to excessive energy in high-power laser systems. Defect detection and digital evaluation of defect information provide a reliable numerical basis for the use of spherical optical components. [0003] The traditional detection method for spherical optical component defects is mainly the visual method, which uses strong light to illuminate the spherical surface, and the human eye uses reflected light and transmitted light to observe from different directions. T...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/958G01B11/00
Inventor 杨甬英刘东柴惠婷李阳李晨吴凡许文林曹频
Owner ZHEJIANG UNIV
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