Method for evaluating surface defects of spherical optical components

Abstract

The invention discloses a method for evaluating surface defects of spherical optical components. The method includes scanning sub-aperture images of the surfaces of the spherical optical components on the basis of microscopic scattering dark-field imaging principles; obtaining information of the surface defects by the aid of a technology for processing the images. The method has the advantages that global correction, three-dimensional registration, two-dimensional projection, digitalized feature extraction and the like on the sub-aperture images of the spherical surfaces are sufficiently utilized, so that the spherical surface defects can be evaluated; size and position information of the defects can be quantitatively given by the aid of defect calibration data; the surface defects of the spherical optical components can be automatically and quantitatively detected by the aid of the method, accordingly, the detection efficiency and the detection precision can be greatly improved, influence of individual subjective factors on detection results can be prevented, and reliable numerical foundation can be ultimately provided for utilizing and processing the spherical optical components.

Description

technical field [0001] The invention belongs to the technical field of machine vision detection, and in particular relates to a surface defect evaluation method of a spherical optical element. Background technique [0002] Spherical optical elements are widely used in large-aperture space telescopes, inertial confinement fusion (ICF) systems, and high-energy laser systems. Unnecessary scattering and diffraction will also occur in the system, resulting in energy loss. This energy loss may also cause secondary damage due to excessive energy in high-power laser systems. Defect detection and digital evaluation of defect information provide a reliable numerical basis for the use of spherical optical components. [0003] The traditional detection method for spherical optical component defects is mainly the visual method, which uses strong light to illuminate the spherical surface, and the human eye uses reflected light and transmitted light to observe from different directions. T...

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Problems solved by technology

[0003] The traditional detection method for spherical optical component defects is mainly the visual method, which uses strong light to illuminate the spherical surface, and the human eye uses reflected light and transmitted light to observe from different directions. The visual method is greatly affected by the proficiency of the inspector, and subjectivity Strong, and long-term detection will cause human eye fatigue, and at the same time cannot give a quantitative description of defect information

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