Digital phase shift point diffraction interferometer and optical system wave aberration measuring method
A point diffraction interferometer and digital phase shift technology, applied in the field of optical detection, can solve the problems of large pinhole window distance and poor interference fringe ratio, and achieve adjustable contrast ratio, accurate phase shift, and adjustable interference fringe density. Effect
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[0028] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.
[0029] see first figure 1 , figure 1 It is the optical path structure diagram of the digital phase shift point diffraction interferometer of the present invention, by figure 1 It can be seen that the digital phase-shifting point diffraction interferometer of the present invention is characterized in that the interferometer includes a light source 1, and along the output beam direction of the light source 1 are a small hole mask 2, a first spatial light modulator 3, and a second spatial light modulator. device 6 and a two-dimensional photodetector 8, the output end of the two-dimensional photodetector 8 is connected to the input end of the computer 9; the first spatial light modulator 3 and the second spatial light modulator 6 are placed in the first spatial light modulator...
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