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Method for preparing Zr/Al reaction laminated foil through EBPVD

A technology of reactive lamination and lamination, applied in coating, metal material coating process, ion implantation plating, etc., can solve the problems of Zr/Al layer interface is easy to introduce impurities, unfavorable self-propagation rate, low production efficiency, etc. , to achieve the effect of complete and clear interface, low cost and high production efficiency

Active Publication Date: 2015-10-07
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The present invention aims to solve the technical problems of low production efficiency, high production cost, easy introduction of impurities at the interface of the Zr / Al layer, causing pollution, and unfavorable acquisition of a higher self-spreading rate in the current preparation method of Zr / Al laminated foil, and proposes A method for preparing Zr / Al reaction laminated foil by EBPVD

Method used

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  • Method for preparing Zr/Al reaction laminated foil through EBPVD
  • Method for preparing Zr/Al reaction laminated foil through EBPVD
  • Method for preparing Zr/Al reaction laminated foil through EBPVD

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specific Embodiment approach 1

[0030] Embodiment 1: This embodiment is a method for preparing Zr / Al reaction laminated foil by EBPVD according to the following steps:

[0031] 1. Preliminary preparations for EBPVD: clean the ingots I and II, clean the vacuum chamber of the EBPVD equipment, and install the substrate. There are two electron guns in the vacuum chamber of the EBPVD equipment, which are electron guns I and II. The ingot I is placed under the electron gun I, the cleaned ingot II is placed under the electron gun II, the separation layer material is placed between the ingot I and the ingot II, the substrate is wiped, and the baffle is closed; The ingot I is pure Zr, and the ingot II is pure Al;

[0032]2. Preheating the ingot: close the vacuum chamber and evacuate until the vacuum degree is 6×10 -3 At Pa, turn on the electron gun Ⅰ and electron gun Ⅱ, set the current of the electron gun Ⅰ to 0.02A~0.1A, and the current of the electron gun Ⅱ to 0.02A~0.1A, use the electron gun Ⅰ to scan the ingot Ⅰ...

specific Embodiment approach 2

[0039] Embodiment 2: The difference between this embodiment and Embodiment 1 is that the material of the separation layer in step 1 is sodium chloride or calcium chloride. Other steps are the same as in the first embodiment.

specific Embodiment approach 3

[0040] Embodiment 3: The difference between this embodiment and Embodiment 1 or 2 is that the substrate described in Step 1 is a large heat sink integral substrate, a circulating water-cooled substrate, a static water-cooled substrate, a segmented substrate, The base plate of the radiation tube or the base plate of the water cooling box, and the thickness of the base plate is greater than 40mm. Other steps are the same as those in Embodiment 1 or 2.

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Abstract

The invention provides a method for preparing Zr / Al reaction laminated foil through EBPVD (Electron Beam Physical Vapor Deposition), and relates to a preparation method of the Zr / Al reaction laminated foil. The method aims at solving the technical problems of the preparation method of the Zr / Al reaction laminated foil that the production efficiency is low; the production cost is high; impurities can be easily introduced on the Zr / Al layer interface, so that the pollution is caused, and the condition is unfavorable for higher self-propagating speed obtaining. The method comprises the following steps of: 1, EBPVD early-stage preparation work; 2, ingot preheating; 3, separation layer deposition; 4, laminated foil deposition. The Zr / Al reaction laminated foil has the advantages that the structure is uniform; the layer thickness is controllable; the interface is complete, clear and pollution-free; the production efficiency is high; the cost is low; through various base plates, the temperature of the base plates in the preparing process can be lower than 200 DEG C, so that the burning of the Zr / Al reaction laminated foil is avoided. The prepared Zr / Al reaction laminated foil can release great heat in a self-propagating mode in short time, and can be applied to the field of special welding.

Description

technical field [0001] The invention relates to a preparation method of Zr / Al reaction laminated foil. Background technique [0002] With the rapid development of high-tech represented by space technology, information technology, new energy and new materials, higher requirements are put forward for material connection technology. Taking the space environment as an example, due to the limitation of aircraft load, traditional fusion welding cannot be used in space; while brazing with high reliability often has a complicated process and is difficult to achieve in space. In VLSI manufacturing, it is necessary to accurately and quickly solder some original devices on the circuit board, and electronic devices are often very sensitive to heat, which requires shortening the connection time as much as possible and reducing the impact on surrounding devices. Zr / Al reactive laminated foil is a new type of layered energetic composite material, which can be used as a local heat source t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/30C23C14/14
Inventor 芦强强宋广平孙跃赫晓东
Owner HARBIN INST OF TECH
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