Aging testing device and aging testing method for chip of nitrogen and oxygen sensor
A chip aging test, nitrogen and oxygen sensor technology, applied in the direction of single semiconductor device testing, etc., can solve the problems of unrealized mass production of nitrogen and oxygen sensor chips, and the aging test of nitrogen and oxygen sensor chips is in a blank state, so as to avoid excessive aging voltage Large, damage-avoiding effect
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[0032] The device provided in Example 1 can simultaneously age 20 nitrogen and oxygen sensor chips to be tested; wherein R1 is the sampling resistor on the first heating loop, R2 is the sampling resistor on the second heating loop, and R20 is the sampling resistor on the second heating loop. Twenty sampling resistors on the heating circuit; specifically, the positive pole of the aging power supply is connected to the first elastic terminal A1 of the fixture through the sampling resistor R1, and A1 clamps the nitrogen and oxygen sensor chip to be tested to heat the positive pole; the negative pole of the aging power supply is connected to the second elastic terminal of the fixture. The elastic terminal A2 is connected, and A2 clamps the nitrogen and oxygen sensor chip to be tested to heat the negative electrode; thus, the aging power supply, the sampling resistor R1 and the heating electrode of the first chip to be tested form a first heating circuit;
[0033] Similarly, the pos...
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