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Laser focusing irradiation effect experimental device and method

A technology of focused irradiation and experimental equipment, which is applied in the field of focused laser irradiation experimental equipment, can solve problems such as poor measurement accuracy and inconvenient application, and achieve the effect of ensuring effectiveness and overcoming uncertainty

Inactive Publication Date: 2015-07-29
NORTHWEST INST OF NUCLEAR TECH
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Problems solved by technology

[0004] The existing method of measuring the distance between the laser focusing lens and the surface of the effect object by a ruler, tape measure, vernier caliper, etc. is inconvenient to apply in the laser ablation test of a large number of effect objects, and its measurement accuracy is poor, and it is difficult for the laser damage threshold measurement, effect Regularity studies bring about large uncertainties

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  • Laser focusing irradiation effect experimental device and method
  • Laser focusing irradiation effect experimental device and method

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Embodiment Construction

[0029] Such as figure 1 and figure 2 As shown, the laser focus irradiation effect experimental device of the present invention includes a focusing lens 2, an effect object fixing frame 6, a two-dimensional adjustment mechanism 5 in the XZ axis direction, an electronically controlled displacement stage 4 in the Y axis direction, and a video microscope 1 . The effector fixing frame 6 is fixed on the two-dimensional adjustment mechanism 5 in the direction of the XZ axis, and can realize the displacement in the direction of the XZ axis along with the two-dimensional adjustment mechanism. Under the action of the electronically controlled displacement platform in the Y-axis direction, the Y-axis movement can be realized as a whole, so as to ensure that the effector has the XYZ three-dimensional displacement adjustment function. The stroke of the electronically controlled displacement stage 4 in the Y-axis direction is generally not less than 20 cm, and its resolution and repeat po...

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Abstract

The invention discloses a laser focusing irradiation effect experimental device and method. The device comprises a focusing lens, effector fixing racks, X-Z axis direction two-dimension adjusting mechanisms, a Y-axis direction electrical control displacement platform and a video microscope. The video microscope is used for assisting in accurate positioning of positions of a light spot measuring device surface and a batch effector sample surface, meanwhile, measurement of effect ablating marks is considered, uncertainty of irradiation laser parameters due to uncertainty of the positions can be greatly reduced, and accuracy of measurement of a laser-damaged threshold and research of effect laws is improved.

Description

technical field [0001] The invention relates to a laser irradiation effect experimental device, in particular to a focused laser irradiation experimental device for multiple effector samples. Background technique [0002] In order to study the laser irradiation effect and damage threshold of some functional materials, optoelectronic devices and other objects, it is an important technical means to carry out laser irradiation experiments with focused small spots. It is necessary to conduct laser irradiation experiments on batch effectors to obtain relevant laws or parameter. [0003] Due to the focusing effect of the lens, the difference in the position of the irradiated surface of the sample will lead to the different size of the irradiated laser spot, and thus the different laser parameters, which will make the laser irradiation effect data have greater uncertainty. To this end, an accurate positioning method is required. One is to make the surface positions of different in...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N17/00
Inventor 林新伟程德艳周梦莲徐作冬邵碧波张震
Owner NORTHWEST INST OF NUCLEAR TECH
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