A radio frequency ion source with built-in magnetic confinement antenna

Abstract

The invention discloses a built-in type magnetic-confinement antenna radio-frequency ion source. A main body is composed of a vacuum chamber, an antenna coil wound by a metal pipe larger than or equal to two turns, a magnetic body and an insulation retainer, the antenna coil wound by the metal pipe is separately arranged in the vacuum chamber through the insulation retainer, the magnetic body is arranged on the outer side of the antenna coil wound by the metal pipe, and the direction of the magnetic electrode of the magnetic body is enabled to face to the antenna coil wound by the metal pipe and the metal pipe winding the antenna coil is filled with a cooling medium. By the arrangement, efficiency of radio frequency is improved, energy consumption is reduced, a magnetic confinement structure of plasma is established by the aid of a magnetic field, the plasma is prevented from directing bombarding the device wall, and on the other hand, lost plasma is captured by a magnetic line of force to the cooled antenna coil to have heat taken away. The built-in type magnetic-confinement antenna radio-frequency ion source is reasonable in layout, ingenious in design and considerate in many factors.

Description

technical field [0001] The invention relates to a radio frequency ion source, especially a radio frequency plasma generating device which can be used in a neutral beam injector. Background technique [0002] At present, the known RF ion source structure is made of cylindrical ceramics or quartz glass as the vacuum chamber, and a coil is wound outside the vacuum chamber as a radio frequency power supply antenna to transmit energy to the plasma in the vacuum chamber. At the same time, in order to prevent the inner wall of the vacuum chamber from being To avoid body bombardment and contamination, a metal cylinder called a Faraday cage is installed inside the vacuum chamber. The disadvantage of this structure is that the Faraday cage is made of metal, so eddy currents will be formed inside the metal under the action of radio frequency signals, so that the energy delivered by the radio frequency power supply to the plasma through the antenna is intercepted and lost. The Faraday ...

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Problems solved by technology

[0003] In order to overcome the shortcomings of the existing RF ion source, the RF power supply efficiency is low, and the plasma confinement is poor, the present invention provides a radio frequency ion source with a built-in magnetic confinement antenna, so that the cooled antenna coil can directly feed the plasma, Improve the efficiency of the radio frequency power supply, reduce energy loss, and rationally arrange the magnets, and use the magnetic field to establish a magnetic confinement structure for the plasma on the one hand, avoiding the direct bombardment of the plasma on the wall of the polluter

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