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Interference-mount separating type nonlinear error correcting method and device for single-frequency laser interferometer

A nonlinear error, single-frequency laser technology, applied in the field of laser measurement, can solve the problem of inability to accurately propose nonlinear error parameters, and achieve the effect of reducing hardware requirements and reducing requirements

Active Publication Date: 2015-07-01
HARBIN INST OF TECH
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Problems solved by technology

[0005] Aiming at the problem that the above-mentioned Heydemann correction method cannot accurately propose and correct the nonlinear error parameters when the displacement of the target mirror is less than λ / 2, and the light source modulation method needs to modulate the laser light source to identify the nonlinear error, the present invention proposes and develops an interferometric The non-linear error correction method and device of the separated single-frequency laser interferometer can achieve the purpose of obtaining the nonlinear error parameters when the single-frequency laser interferometer is turned on, and making corrections during displacement measurement

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  • Interference-mount separating type nonlinear error correcting method and device for single-frequency laser interferometer
  • Interference-mount separating type nonlinear error correcting method and device for single-frequency laser interferometer
  • Interference-mount separating type nonlinear error correcting method and device for single-frequency laser interferometer

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Embodiment Construction

[0025] Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0026]A non-linear error correction device for interferometric separation of single-frequency laser interferometers, in which a polarization beam splitter A2, a 1 / 4 wave plate B6, and a measuring mirror 8 are sequentially arranged on the output optical path of a frequency-stabilized laser 1, and the 1 / 4 wave The plate B6 is located in the x, y plane, and is coaxial with the polarization beam splitter prism A2, and the direction of the fast axis of the 1 / 4 wave plate B6 is 45° counterclockwise with the y axis; / 4 wave plate A3 and reference mirror 5, the 1 / 4 wave plate A3 is located in the y, z plane, and is coaxial with the polarizing beam splitter prism A2, and the fast axis direction of the 1 / 4 wave plate A3 is in a clockwise direction with the y axis 45 °; 1 / 2 wave plate 9, depolarization beam splitting prism 10 and polarization beam splitting prism...

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Abstract

The invention provides an interference-mount separating type nonlinear error correcting method and device for a single-frequency laser interferometer, and belongs to the technical field of laser measurement. The method is that performing separating measurement for reference light and measuring light strength through a light switch; extracting nonlinear error parameters in the related light signals; correcting DC deviation error and non-uniform amplitude of an orthogonal signal and other errors. With the adoption of the method and the device, the technical effect of extracting the nonlinear error parameters in the single-frequency laser interferometer as startup and quickly correcting the nonlinear error in the single-frequency laser interferometer on real time can be achieved.

Description

technical field [0001] The invention belongs to the technical field of laser measurement, and mainly relates to a method and device for correcting nonlinear errors of a single-frequency laser interferometer. Background technique [0002] Today, with the rapid development of ultra-precision measurement, fast ultra-precision displacement measurement has received extensive attention and research, and its application in the aerospace field has put forward higher requirements for measurement accuracy. Compared with the dual-frequency laser interferometer, the single-frequency laser interferometer has many advantages such as simple structure, easy circuit processing, and lower environmental requirements. main means. However, nonlinear errors have always been a key issue limiting the accuracy of single-frequency laser interferometers. [0003] In 1981, Heydemann proposed to use the ellipse fitting method of the least square method to obtain the nonlinear error parameters in the i...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02
Inventor 谭久彬朱静浩胡鹏程
Owner HARBIN INST OF TECH
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