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Leak detection device and fluid controller with the leak detection device

A leak detection device and fluid controller technology, which can solve the problems of fluid leakage detection accuracy and other problems by detecting the appearance of fluid at the leak point, measuring devices, and testing of fluid tightness, so as to improve detection accuracy and realize small effect

Inactive Publication Date: 2017-08-04
FUJIKIN INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] In the device described in Patent Document 1, there is a problem that the detection accuracy of fluid leakage is poor.

Method used

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  • Leak detection device and fluid controller with the leak detection device
  • Leak detection device and fluid controller with the leak detection device
  • Leak detection device and fluid controller with the leak detection device

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Embodiment Construction

[0021] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following descriptions, top, bottom, and left and right are specified as figure 1 up and down and left and right.

[0022] Such as figure 1 as well as figure 2 As shown, the fluid controller 1 is composed of a fluid controller main body (leak detection target member) 2 for controlling (blocking and opening, flow rate adjustment, etc.) fluid flow, and a leak detection device 3 for detecting fluid leakage in the fluid controller main body 2 .

[0023] The fluid controller main body 2 is a well-known diaphragm valve, although the internal structure is omitted, but as image 3 As shown, the fluid controller main body 2 has: a main body 11, which is provided with an inlet pipe joint part 12 and an outlet pipe joint part 13; a substantially cylindrical valve cover 14, which fits and covers the upper part of the main body 11; and a housing 15 , which is installed abo...

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PUM

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Abstract

Provided are a leak detection device and a fluid controller having the leak detection device, which can be miniaturized and always mounted on a leak detection target member such as a fluid controller, whereby fluid leakage can be constantly monitored. The fluid controller (1) is composed of a fluid controller main body (2) and a leak detection device (3) installed on the fluid controller main body (2). A leakage port (16) for detecting leakage is provided on the fluid controller main body (2). The leak detection device (3) has: a sensor holding body (21), which is installed on the fluid controller main body (2); an ultrasonic sensor (22), which is held on the sensor holding body ( 21); the ultrasonic path (23), which is located between the sensing surface of the ultrasonic sensor (22) and the leakage port (16); the processing circuit (24), which processes the ultrasonic waves obtained by the ultrasonic sensor (22).

Description

technical field [0001] The present invention relates to a leakage detection device for detecting fluid leakage and a fluid controller with the leakage detection device. Background technique [0002] As a fluid controller provided with a leak detection device, a fluid controller in which a vibration sensor (pick up) is attached to a fluid controller body is known (Patent Document 1). [0003] In addition, a device using an ultrasonic sensor is known as a device for detecting leakage of a fluid controller (Patent Document 2). [0004] prior art literature [0005] Patent Document 1: Japanese Publication No. 61-8850 [0006] Patent Document 2: Japanese Patent Laid-Open No. 2001-305005 [0007] In the device described in Patent Document 1, there is a problem that the detection accuracy of fluid leakage is poor. As in Patent Document 2, the accuracy of leak detection is improved by using an ultrasonic sensor. The leak detection device of Patent Document 2 detects leaks as ne...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M3/24
CPCG01M3/24G01M3/243
Inventor 土肥亮介筱原努西野功二铜敏男池田信一山路道雄
Owner FUJIKIN INC
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