Ethanol sensitive material and semiconductor ethanol sensor

Abstract

The invention discloses an ethanol sensitive material and a semiconductor ethanol sensor, and belongs to the technical field of gas detection. The ethanol sensitive material is niobium pentoxide or / and titanium dioxide doped zinc oxide or niobium pentoxide and / or titanium dioxide doped tin oxide or a mixture of the niobium pentoxide or / and titanium dioxide doped zinc oxide / tin oxide. The semiconductor ethanol sensor comprises a heating and detecting part and a sensitive layer made from the ethanol sensitive material. The ethanol sensitive material, by doping niobium pentoxide or / and titanium dioxide in zinc oxide, tin oxide or the mixture thereof, can improve the sensitivity of a metallic oxide sensing material to ethanol by an order of magnitude and the sensitivity to other volatilizable organic gas by 5 times, and the reaction temperature is reduced. The semiconductor ethanol sensor disclosed by the invention has the advantages of simple structure and high integration degree, and the semiconductor ethanol sensor can be prepared by adopting various mature semiconductor technologies.

Description

technical field [0001] The invention relates to an alcohol-sensitive material and a semiconductor alcohol sensor based on the alcohol-sensitive material, belonging to the technical field of gas detection. Background technique [0002] High-precision alcohol detection and monitoring has extremely wide applications in industrial applications and traffic management. In the actual work of the traffic control department, the breath alcohol content test is usually used to judge whether the driver has drunk driving behavior. The breath alcohol tester uses an alcohol sensor to measure the alcohol content in the person's exhaled breath. Commonly used alcohol sensors include semiconductor type and fuel cell type. Existing alcohol sensors are mostly of fuel cell type, although they have high precision, they are expensive. Semiconductor alcohol sensors based on intrinsic metal oxides generally have low response sensitivity to reducing gases. It is particularly important that metal oxi...

AI Technical Summary

Problems solved by technology

Most of the existing alcohol sensors are fuel cell type, although they have high precision, they are expensive

Semiconductor alcohol sensors based on intrinsic metal oxides generally have low response sensitivity to reducing gases, and it is particularly important that metal oxide sensors are sensitive to most reducing gases, so the selectivity to ethanol detection is poor

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