Resonant Tunneling Diode High Sensitivity Detector with Low Dark Current
A resonant tunneling, high-sensitivity technology, applied in circuits, electrical components, semiconductor devices, etc., can solve the problems of limiting the application of resonant tunneling diode detectors, large dark current of devices, large tunneling current and noise current, etc., to achieve The effect of increasing the difficulty of passing, increasing the height of the barrier, and reducing the current density
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[0025] see figure 1 As shown, the present invention provides a low dark current resonant tunneling diode high-sensitivity detector, including:
[0026] A substrate 1, the material of the substrate 1 is N+ type InP, and its main function is as a substrate for epitaxial layer growth;
[0027] An emitter contact layer 2, which is made on the substrate 1, the material of the emitter contact layer 2 is In 0.53 Ga 0.47 As, the doping concentration is n-type 2×10 18 -5×10 18-3 , with a thickness of 400-600nm, the main function is to form a low-resistance emitter ohmic contact;
[0028] An emitter region 3, which is made on the emitter contact layer 2, a table 21 is formed on the other side of the emitter contact layer 2, and the material of the emitter contact layer is In 0.53 Ga 0.47 As, the doping concentration is n-type 1×10 18 -5×10 18 cm -3 , with a thickness of 200-400nm, the main function is to form the emission region of the resonant tunneling diode, so that the Ferm...
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