A macro-micro two-stage drive precision positioning mechanism

A technology of precise positioning and positioning pliers, applied in the direction of using feedback control, etc., can solve the problems of difficult manufacturing and installation of two-stage guide rails, high manufacturing costs, complicated structures, etc., to eliminate backlash errors, reduce complexity, The effect of reducing manufacturing costs

Active Publication Date: 2017-07-14
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The purpose of the present invention is to provide a macro-micro two-stage drive precision positioning mechanism to solve the technical problems of the prior art that the linear motion has no guide rail guidance, the two-stage guide rail is difficult to manufacture and install, the structure is complicated and the manufacturing cost is high.

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  • A macro-micro two-stage drive precision positioning mechanism
  • A macro-micro two-stage drive precision positioning mechanism
  • A macro-micro two-stage drive precision positioning mechanism

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Embodiment Construction

[0025] The present invention will be further elaborated below in conjunction with the accompanying drawings.

[0026] See attached figure 1 , attached figure 2 , attached image 3 , attached Figure 4 , attached Figure 5 , attached Figure 6 And attached Figure 7 , a macro-micro two-stage driving precision positioning mechanism of the present invention includes a piezoelectric driver 5, a shock absorbing system 1, a base 2, an air bearing rail 3, a macro-positioning system 4, a micro-positioning slider 6, a bracket 8 and Laser interferometer 7;

[0027] The base 2 is fixedly connected to the upper end surface of the shock absorption system 1 by screws, the air bearing guide rail 3 is fixedly connected to one end of the installation plane of the base 2 by screws, and the bracket 8 is fixedly connected to the other end of the installation plane of the base 2 by screws , the laser interferometer is fixedly connected to the bracket 8 by screws, and the micro-movement pos...

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Abstract

The present invention is a macro-micro two-stage drive precision positioning mechanism, which belongs to the technical field of precision positioning, and solves the technical problems of the prior art two-stage guide rails that are difficult to manufacture and install, complicated in structure and high in manufacturing cost; the present invention includes piezoelectric actuators , shock absorption system, base, air bearing guide rail, macro positioning system, micro positioning slider, bracket and laser interferometer; On one end of the base, the bracket screw is connected to the other end of the base, the laser interference is connected to the bracket by the screw, the micro-positioning slider and the air-floating guide rail are in clearance fit; the mover of the linear motor is fixedly connected to the macro-positioning clamping slider , the stator of the linear motor is screwed to the base, and the two clamp rails are screwed to the base; one end of the piezoelectric driver is fixedly connected to the micro-positioning slider, and the other end is fixedly connected to the macro-positioning clamping slider.

Description

technical field [0001] The invention belongs to the technical field of precision positioning, and in particular relates to a macro-micro two-stage drive precision positioning mechanism. Background technique [0002] With the rapid development of chip lithography and packaging in IC manufacturing, device packaging and assembly in MESM manufacturing, and precision machining and precision measurement in precision engineering, higher and higher requirements are placed on the travel and accuracy of positioning systems. , The macro-micro two-stage drive precision positioning mechanism solves the contradiction between large stroke and high precision in precision positioning technology, and the macro-micro two-stage drive positioning mechanism is increasingly used in engineering applications. [0003] At present, the devices used as micro-displacement drives in the macro-micro two-stage drive positioning technology mainly include piezoelectric drives, voice coil motors, magnetostric...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05D3/12
Inventor 黄剑波谭向全郑黎明王潇洵孙强
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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