Fingerprint recognition sensor
A technology of fingerprint identification and sensor devices, which is applied in the field of microelectronics packaging, can solve problems such as complex process steps, adverse effects on final product yield and reliability, and increased manufacturing costs
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no. 1 example
[0016] figure 1 It is a schematic cross-sectional view of the fingerprint recognition sensor device according to the first embodiment of the present invention.
[0017] Please refer to figure 1 The fingerprint identification sensor device includes a substrate 10, which may be a printed circuit board, a ceramic body or similar structures, and the substrate 10 has a solder ball interconnection structure (not shown in the figure) formed on its lower surface. At least one chip is disposed on the upper surface of the substrate 10 through an adhesive material (not shown in the figure). In this embodiment, at least one chip can be a memory chip 11 and an ASIC chip 12, and the bonding material can be a commonly used polymer bonding material, silica gel, epoxy resin, benzocyclobutene, solder, etc. . The memory chip 11 and the ASIC chip 12 are bonded to the upper surface of the substrate 10 through the first metal wire 13 .
[0018] At least one embankment 14 is configured on the up...
no. 2 example
[0022] figure 2 It is a schematic cross-sectional view of the fingerprint recognition sensor device according to the second embodiment of the present invention.
[0023] Please refer to figure 2 , the second embodiment with figure 1 The difference of the first embodiment shown is that the upper surface of the fingerprint identification sensor chip 15 having the sensor element array 16 is covered by the plastic encapsulation material 19, and the thickness of the plastic encapsulation material 19 on the upper surface of the fingerprint identification sensor chip 15 is 20 Micron to 120 microns, the Mohs hardness of the molding material 19 is greater than or equal to 5H, so as to ensure that it has sufficient hardness to effectively protect the fingerprint identification sensor chip 15 and the sensor element array 16 located thereon. Meanwhile, in order to improve the sensing accuracy and sensitivity of the sensor element array 16 , the dielectric constant of the molding mater...
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