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Grating ruling tool initiative adjusting device having abbe error correcting function

A grating knife, active adjustment technology, applied in the directions of diffraction grating, optics, optical components, etc., to reduce positioning errors, improve grating scoring quality and performance indicators, and reduce positioning errors.

Active Publication Date: 2015-04-22
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The present invention aims to overcome the defects of existing grating cutters and provide an active adjustment device for grating cutters with Abbe error correction function

Method used

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  • Grating ruling tool initiative adjusting device having abbe error correcting function
  • Grating ruling tool initiative adjusting device having abbe error correcting function
  • Grating ruling tool initiative adjusting device having abbe error correcting function

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Embodiment Construction

[0029] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.

[0030] In the description of the present invention, the terms "inner", "outer", "longitudinal", "transverse", "upper", "lower",

[0031] The orientations or positional relationships indicated by "top", "bottom", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and do not require that the present invention must be constructed and operated in a specific orientation, so it cannot be understood To limit the present invention.

[0032] Such as figure 1 and figure 2 As shown, the pre...

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Abstract

The invention relates to the technical field of grating ruling and particularly discloses a grating ruling tool initiative adjusting device having an abbe error correcting function. The grating ruling tool initiative adjusting device comprises a tool rest lifting mechanism, a tool rest supporting frame, a micro positioning worktable, a worktable installation seat, flexible hinges, piezoelectric ceramics, tension springs, a small tool rest and a diamond ruling tool. The piezoelectric ceramics and the micro positioning worktable are in contact through friction, and the four symmetrical flexible hinges enable the micro positioning worktable to have large rigidity in direction except the Z-axis direction. The micro positioning worktable conducts micro positioning movement in the Z-axis direction under the stretching movement of the piezoelectric ceramics, and thus the displacement deviation between the actual position and the ideal position of the diamond ruling tool can be minimized. According to the grating ruling tool initiative adjusting device, a double-axis interferometer is used for measuring the position of the diamond ruling tool in real time, the influence of abbe measurement errors caused by using a one-axis interferometer on the positioning precision of the diamond ruling tool is avoided, the positioning error of the diamond ruling tool can be easily reduced, the grating ruling quality can be improved, and the performance index can be increased.

Description

technical field [0001] The invention relates to the technical field of grating scribing, in particular to an active adjustment device for a grating cutter with an Abbe error correction function. Background technique [0002] The grating mechanical scribing method mainly relies on a diamond knife to extrude a series of evenly spaced grooves on the surface of the aluminum film. Therefore, the structural stability and operating accuracy of the tool holder system equipped with the diamond knife are high. [0003] The existing active tool adjustment device for the scribing tool holder uses a laser interferometer to measure the relative displacement between the grating scribing tool holder and the workbench carrying the grating substrate, and uses a piezoelectric actuator to measure the relative displacement between the grating scribing tool holder and the workbench carrying the grating substrate. The position of the knife is adjusted in real time, so that the deviation between th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/18
CPCG02B5/1852
Inventor 李晓天于海利唐玉国刘兆武杨超齐向东
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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