Electrostatic protection ring based on high-voltage process

Abstract

Disclosed is an electrostatic protection ring based on a high-voltage process. The electrostatic protection ring comprises a first physical layer, a second physical layer, and multiple holes connecting the first physical layer with the second physical layer, and is characterized in that the closed angle area at the corner of the electrostatic protection ring is not provided with the holes. By using the electrostatic protection ring based on the high-voltage process, the number of the holes at the corner is reduced, such that an electric field wire is weakened at the corner, the pressure-withstanding performance of the corner is enhanced, and the antistatic grade of a whole chip is improved.

Description

technical field [0001] The invention belongs to the field of semiconductor manufacturing and relates to an electrostatic protection ring based on a high-voltage process. Background technique [0002] Static electricity can be generated when different substances come into contact, separate or rub against each other. For example, extrusion, cutting, handling, stirring and filtering in the production process, as well as walking, standing up and undressing in life, will generate static electricity. It can be seen that static electricity can be said to be ubiquitous in our daily life, and our body and surroundings carry a high electrostatic voltage, thousands of volts or even tens of thousands of volts. These static electricity can directly cause some ESDS (electrostatic sensitive components) to lose their normal performance, or even completely lose their normal function. [0003] Electrostatic protection structure has always been a difficult point in the manufacture of integra...

AI Technical Summary

Problems solved by technology

[0003] Electrostatic protection structure has always been a difficult point in the manufacture of integrated circuits. The randomness of electrostatic current and the damage to the weakest part of the circuit increase the difficulty of designing integrated circuits. The protection ring is a commonly used structure in the field of integrated circuit manufacturing. , used to lead away the electrostatic current on the pin from the ground wire or the power line. In order to increase the current path, the connection holes between the layers of the guard ring are usually as full as possible, but at the corner of the guard ring, Because of the concentration of power lines in the sharp corner area, it is easy to break down at the corner

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