Method for calibrating small-aperture diaphragm
A technology of small hole diaphragm and optical method, which is applied in the direction of using optical devices, measuring devices, instruments, etc., to achieve the effects of less human-subjective error factors, high measurement accuracy, and simple and easy-to-understand principles of the invention
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[0015] exist figure 1 Among them, the observation screen (5) is a reticle that can measure the size of the pattern. When the laser (1) passes through the collimated beam expander system (2), the size of the output parallel circular beam should be slightly larger than the diameter of the fixed aperture diaphragm (4). The diameter of the fixed aperture diaphragm (4) can be obtained by measuring the light spot.
[0016] exist figure 2 Among them, the Mach-Zehnder interference system is composed of the beam splitter (2), the total mirror (3) and the beam combiner (5). A laser (1) is used as the input light source of the interference system, and a small hole aperture (4) of the same specification to be tested is respectively placed in any adjacent two arms of the interference system, and the actual diameters of the two apertures (4) are required to be consistent. Promptly require that two diaphragms (4) driving levers should be dialed to the same position. A double optical wed...
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