Pulse micro displacement sensor and displacement measuring method thereof

Abstract

The invention discloses a pulse micro displacement sensor and a displacement measuring method thereof. The sensor comprises an infrared light source, a moving grating, a fixed grating, a first infrared photoelectric multiplier, a second infrared photoelectric multiplier, a first comb-like electrode, a second comb-like electrode, an upper-layer capacitor flat plate, a lower-layer capacitor flat plate, a cantilever beam in the shape of a Chinese character hui of the moving grating, a processing module for calculating the displacement according to the photoelectric signal and a current drive module for conveying current to the comb-like electrodes and the capacitor flat plates. When the interval of the two layers of the gratings is precisely controlled within the wavelength scale of 1 / 5 according to a special condition in a Wood abnormal phenomenon, the parameters such as period and duty cycles of the gratings are regulated; when the two layers of the gratings move, reflected light generates a pulse type change phenomenon which has slope higher than that of common Wood abnormal light intensity change flat curve, so that the tiny displacement signal can be greatly amplified to measure the displacement. Moreover, the dynamic range is expanded, the miniaturization is realized, and the application prospect in the military filed is wide.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a pulse micro-displacement sensor. Background technique [0002] In recent years, with the development of integrated circuit manufacturing technology and micro-machining technology, micro-mechanical sensors based on these two manufacturing technologies have developed rapidly. With its small size, light weight, low power consumption, low cost, easy integration, strong overload capability and mass production, micromechanical sensors have quickly occupied various sensor fields, such as micromechanical acceleration sensors. At present, with the improvement of the performance requirements of micro-mechanical displacement sensors, especially the continuous expansion of the application requirements of medium and high-precision displacement sensing, the research of high-precision micro-optical mechanical displacement sensors combined with optical measurement and micro-optical technology ...

AI Technical Summary

Problems solved by technology

Although there are many types, the highest displacement accuracy of the current displacement sensor can only reach the nanometer level. A nanoscale micro-displacement measurement device is a double-grating MEMS displacement sensor designed by Sandia National Lab in the United States. to measure tiny displacements, but the device can only measure micron-scale displacements, and it is difficult to achieve higher accuracy. The main limiting factor is the low curvature of the curve of light intensity VS grating displacement, which makes the change of light intensity relative to displacement small

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