Power semiconductor device and manufacturing method thereof

Abstract

Provided is a power semiconductor device and a manufacturing method thereof. The power semiconductor device comprises a first doping type semiconductor substrate which is provided with a device area. A second doping type main junction area and multiple field limiting rings are formed at the edge of the device area. The first doping type and the second doping type are opposite. A first doping area is formed in the semiconductor substrate arranged between the main junction area and the first field limiting ring adjacent to the main junction area. The doping type of the first doping area is the same with that of the semiconductor substrate, and doping density is higher than that of the semiconductor substrate. In the semiconductor power device, surface concentration of the semiconductor substrate between the main junction area and the first field limiting ring is increased by the first doping area between the main junction area and the first field limiting ring. Influence on the electric field caused by field plate accumulation of movable charges on the main junction area under the high-temperature and high-voltage condition can be effectively reduced due to high electronic potential.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a power semiconductor device and a manufacturing method thereof. Background technique [0002] The basic requirement of modern power semiconductor devices is to be able to withstand high voltage and high current operation. Among them, the silicon-based power MOSFET usually forms a MOS power semiconductor device with a large aspect ratio by connecting a large number of MOS units in parallel to ensure that the surface voltage between the parallel MOS units in the middle of the large part is roughly the same. However, the voltage between the MOS unit at the boundary (ie terminal) and the surface of the substrate is very different, which often causes the surface electric field to be too concentrated, and due to the curvature effect of the planar junction, the junction bending part of the PN junction at the boundary and the electric field at the surface Increase, causing the e...

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Problems solved by technology

[0009] Based on this, it is necessary to provide a new solution to the phenomenon that the leakage current of the devices of the existing planar terminal technology is too large or even continuously increases and cannot be stabilized under high temperature conditions, and the breakdown voltage decreases or even short circuit occurs after returning to normal temperature.

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