Full-silicon MEMS (micro-electromechanical system) methane sensor, gas detection application and preparation method of full-silicon MEMS methane sensor

Abstract

The invention discloses a full-silicon MEMS (micro-electromechanical system) methane sensor, gas detection application and a preparation method of the full-silicon MEMS methane sensor, is suitable for being used under an industrial and mining environment, belongs to a methane sensor as well as a preparation method and a detection method thereof, and particularly belongs to a methane sensor adopting an MEMS processing technology and a methane detection method thereof. The full-silicon MEMS sensor is prepared from a heating material with monocrystalline silicon serving as a heating element; the heating element is also used as a methane sensitive element; furthermore, the detection on low-concentration methane can be realized without a catalyst carrier and a catalyst material. The full-silicon MEMS methane sensor is processed by taking an SOI (silicon on insulator) silicon slice as a substrate and adopting an MEMS technology; the processing technology is compatible with a CMOS technology (complementary metal oxide semiconductor) technology. The full-silicon MEMS methane sensor has the characteristics of low power consumption, high sensitivity, no influence from oxygen deficit, and no influence of carbon deposition, poisoning and the like from catalysts.

Description

technical field [0001] The invention relates to a methane sensor and a gas detection application and preparation method, and is especially suitable for an all-silicon MEMS methane sensor used for gas prevention in industrial and mining production, and a gas detection application and preparation method. Background technique [0002] At present, catalytic combustion methane sensors based on traditional platinum wire heating are still widely used in coal mines. The principle is based on the heat release effect of the catalytic combustion reaction of methane gas, and there are many disadvantages due to the use of catalysts. Such as short adjustment cycle, carbon deposition, poisoning, activation, etc. are fundamentally due to the use of catalysts and catalyst carriers. The existing catalytic combustion methane sensor uses a coil wound with precious metals such as platinum wire as a heating element, which is difficult to mass produce, has poor consistency, and consumes a lot of ...

AI Technical Summary

Problems solved by technology

The existing catalytic combustion methane sensor uses a coil wound with precious metals such as platinum wire as the heating element, which is difficult to mass produce, has poor consistency, and consumes a lot of power

Therefore, the application requirements of the Internet of Things for methane sensors cannot be well met

The existing thermal conductivity type gas sensor is used to detect high concentration methane-based gas in coal mines, but it cannot be used for detection and alarm for low concentration of methane-based gas with a low concentration of less than 4% due to its low sensitivity

Images