A micro-beam x-ray fluorescence spectrometer

Abstract

The invention relates to a micro-beam X-ray fluorescence spectrometer, which uses a laser displacement sensor with a high-precision resolution of less than 5 microns to detect the distance between a sample and the laser displacement sensor, and converts the signal of the distance H into a digital signal through a digital-to-analog conversion card Transfer to the computer, the computer transfers the signal to the stepper motor controller, and then the stepper motor controller transfers the signal to the stepper motor driver, and then the stepper motor driver drives the four-dimensional sample stage to XYZθ by 4 stepper motors Move in four directions to keep the tested point of the sample at the position of the back focus of the capillary X-ray lens.

Description

technical field [0001] The invention relates to an X-ray fluorescence analysis spectrometer, in particular to a microbeam X-ray fluorescence spectrometer. Background technique [0002] X-ray fluorescence spectrometer is an important analytical method for non-destructive analysis of element content in various samples. Its principle is that the X-ray beam emitted from an X-ray source (such as an X-ray tube, etc.) The electrons in the inner layer of the nucleus of the contained elements are excited by the irradiated X-rays, leaving vacancies, and the electrons outside the nucleus transition to the inner vacancies, and emit X-rays with characteristic energy, and the X-ray detector receives the characteristic X-rays emitted by the elements in the sample. After passing through electronic systems such as preamplifier, main amplifier and multi-channel analyzer, the element type and element content are determined according to the characteristic energy and peak area emitted by the ele...

AI Technical Summary

Problems solved by technology

However, in micro-beam X-ray line scanning and surface scanning, due to the unevenness of the sample surface, the distance between different positions of the tested sample and the outlet of the capillary X-ray lens is greater or smaller than the back focus of the capillary X-ray lens, resulting in The diameter of the X-ray spot that irradiates the sample is larger than the focal spot of the capillary X-ray lens, and at the same time the intensity of the irradiated sample point becomes smaller, which brings errors to the resolution and analysis data of line scanning and area scanning

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