Flexible capacitive pressure sensing device

Abstract

The invention relates to a flexible capacitive pressure sensing device. A plurality of strip-shaped lower counter electrodes are arranged in the horizontally longitudinal direction below a plurality of strip-shaped upper counter electrodes arranged in the horizontally transverse direction, and corresponding to all the cross areas of the upper counter electrodes and the lower counter electrodes, pressure acting areas are connected to the centers of the upper surfaces of the upper counter electrodes in a pasted mode; the center areas of the lower surfaces of the upper counter electrodes are plated with a silver coating serving as an upper electrode; an insulating protection layer corresponding to cross areas in size is arranged below the upper electrode; the center areas of the upper surfaces of the lower counter electrodes are plated with a sliver coating serving as a lower electrode; two pad strips are arranged on the two sides of the lower electrode. Each cross area forms a capacitive sensor, the multiple capacitive sensors form a capacitive sensing array, and the multiple capacitive sensing arrays form the large-area flexible capacitive pressure sensing device. The capacitive sensors are good in elasticity and can be fully attached to non-planar objects, and therefore the sensory sensitivity and the compression resilience of the capacitive sensors can be guaranteed; besides, the flexible capacitive pressure sensing device can perform large-area measurement on various stress surfaces.

Description

technical field [0001] The invention relates to the field of capacitive sensors, in particular to a flexible capacitive pressure sensing device capable of sensing pressure changes based on capacitance changes. Background technique [0002] A capacitive sensor is a parametric sensor that converts the measured value into a change in capacitance. Capacitive sensors are widely used in the detection of pressure, liquid level, displacement and other indicators. Common capacitive sensors can be divided into three types: variable area change type, variable dielectric constant change type, and variable gap change type. Among them, the variable gap change type is generally used to measure small linear displacement or pole distance changes caused by force and vibration. Such capacitive sensors capable of measuring pressure changes are called capacitive pressure sensors. Traditional capacitive pressure sensors use hard materials with small deformation and low sensitivity. They cannot...

AI Technical Summary

Problems solved by technology

Although the manufacturing process of this capacitive sensor is simple and the flexible area is large, due to the compression hysteresis of the compressible foam and the poor recovery under pressure, the sensing sensitivity of the capacitive sensor is reduced, and the dielectric constant of the electrode material is not high enough. Poor insulation between capacitive sensors, easy crosstalk between capacitive sensors

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