Silicon-based MEMS array propeller and preparation method thereof

An array type thruster technology, applied in the field of micro-propulsion technology and micro-electromechanical systems, can solve problems such as igniter fracture and failure, achieve the effects of improving yield, avoiding igniter fracture, and improving production efficiency

Inactive Publication Date: 2014-12-10
NORTHWESTERN POLYTECHNICAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is: in order to overcome the problem of igniter fracture and failure caused by the high bonding temperature of the existing micro propulsion technology, the present invention proposes a MEMS array propeller formed only by silicon material

Method used

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  • Silicon-based MEMS array propeller and preparation method thereof
  • Silicon-based MEMS array propeller and preparation method thereof
  • Silicon-based MEMS array propeller and preparation method thereof

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Embodiment Construction

[0023] refer to Figure 1-2 , the silicon-based MEMS array propeller in this embodiment includes a nozzle 1, an ignition resistor 2, an ignition wire 3 and a pad 4; the thickness of the silicon-based material is 500 μm; the upper surface of the propeller is concaved to form a nozzle 2 The nozzle 2 is a circle with a diameter of 1000 μm; the lower surface of the propeller is sputtered with an ignition resistor 2, an ignition wire 3 and a welding pad 4; the ignition resistor 2 is composed of two parallel serpentine folded metal gold film resistors; The width and thickness are 50 μm and 300 nm respectively; each ignition resistor 2 corresponds to the position of each nozzle 1; the ignition resistor 2 is connected to the ignition wire 3; the width and thickness of the ignition wire 3 are 100 μm and 300 nm respectively; the ignition wire 3 and the pad 4 connections; the area and thickness of pad 4 are 0.5mm 2 , 300nm.

[0024] When working, the ignition resistor 2 is energized th...

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Abstract

The invention discloses a silicon-based MEMS array propeller and a preparation method thereof, and belongs to the technical field of micro propulsion. The propeller mainly comprises a nozzle array part and a circuit part respectively positioned on the upper and lower surfaces of a silicon slice, wherein the nozzle array consists of cavity arrays inwards recessed in the upper surface of the silicon slice; all the nozzles are filled with oil fuel; the circuit part consists of ignition resistor 2 arrays formed on the lower surface of the silicon slice through sputtering, ignition leads 3 and welding pads 4; and all ignition resistors 2 are corresponding to all the nozzles 1 in position. The invention further discloses a non-bonding process for preparing the silicon-based MEMS array propeller. The silicon-based MEMS array propeller has the following benefits: the nozzles and the ignition resistors are integrated on the upper and lower surfaces of a silicon material so that such procedures as bonding and assembly for a conventional MEMS propeller are not needed and the production efficiency of the propeller is largely improved; meanwhile, the problems of break and failure of an igniter due to the difference of thermal expansion coefficients of a glass layer and an ignition circuit in the prior art are solved; and the yield is improved.

Description

[0001] Field: [0002] The invention relates to a silicon-based MEMS array thruster and a preparation method thereof, which are used for position maintenance, attitude control and orbit adjustment of pico-satellites, and belong to the field of micro-propulsion technology and micro-electromechanical systems (MEMS). Background technique: [0003] The propulsion system is a key subsystem of most spacecraft, mainly used for position keeping, attitude control, gravitational compensation and orbit adjustment of the spacecraft. With the continuous maturity of micro-spacecraft, such as micro-satellites, nano-satellites, and pico-satellites, if micro-spacecraft are required to complete certain special tasks, such as satellite formation flight, these micro-spacecraft need to be equipped with propulsion systems. Because the traditional propulsion system is relatively large in size and mass, it cannot be applied to micro-spacecraft. Therefore, there is an urgent need for a micro-propulsio...

Claims

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Application Information

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IPC IPC(8): F02K9/42
Inventor 谢建兵申强屈贝妮常洪龙苑伟政
Owner NORTHWESTERN POLYTECHNICAL UNIV
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