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Crucible

A crucible and body technology, applied in the crucible field of evaporation process, can solve the problems of time-consuming, lower production efficiency, poor thermal conductivity, etc., and achieve the effects of avoiding sealing, reducing heat loss, and avoiding bursting

Inactive Publication Date: 2014-10-22
EVERDISPLAY OPTRONICS (SHANGHAI) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For example, metal crucibles are commonly used in titanium crucibles, copper crucibles, aluminum crucibles, etc. Due to the good thermal conductivity of metals, it is easy to cause the materials in the crucible to be heated unevenly and cause detonation. ; Alumina crucibles and quartz crucibles have poor thermal conductivity, and the temperature at the opening of the crucible is low. After evaporation, the material is easy to gather at the opening of the crucible to cause sealing.
Once the crucible opening is sealed, the vacuum has to be broken, and the vacuum must be re-established after cleaning the material from the crucible opening. This process often takes a lot of time
This not only affects the quality of the evaporated film, but also reduces the production efficiency

Method used

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Experimental program
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Embodiment approach 1

[0033] see Figure 2A , Figure 2B with Figure 2C . The first embodiment of the crucible of the present invention includes a first body 2 and a second body 3 . The length L2 of the second body 3 is less than the length L1 of the first body 2, for example, the length L2 of the second body 3 is 1 / 6 of the length L1 of the first body 2, of course it is not limited to this, it can be based on the overall length of the crucible Factors such as L are reasonably determined. Usually, the length L2 of the second body 3 increases with the overall length L of the crucible. Generally speaking, the length L2 of the second body 3 is 1 / 10-10 of the length L1 of the first body 2. 1 / 5 range is feasible. The thermal conductivity of the second body 3 is greater than that of the first body 2, which can be achieved by selecting different materials to manufacture different bodies, for example, the first body 2 is made of non-metallic materials such as alumina, quartz, ceramics or carbon-carbon...

no. 2 approach

[0040] see Figure 3A with Figure 3B . The second embodiment of the crucible of the present invention differs from the first embodiment only in the connection structure between the second body 3 and the first body 2 .

[0041] Specifically, the first connecting portion of the first body 2 is the first inclined surface 212 on the upper end of the first side wall 21, and the second connecting portion of the second body 3 is the second inclined surface on the lower end of the second side wall 31. portion 312 , the second slope portion 312 is in contact with the first slope portion 212 , and the first slope portion 211 is disposed inside the second slope portion 311 , and of course the first slope portion 211 is disposed outside the second slope portion 311 . When the crucible is heated and expanded, the second body 3 and the first body 2 deform differently due to the difference in thermal conductivity. At this time, the second body 3 can move up and down along the length direc...

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Abstract

A crucible is disclosed. The crucible comprises a first body and a second body. The first body comprises a first cylindric side wall and a crucible bottom connected to the end part of the first side wall. The second body comprises a second cylindric side wall. The upper end of the second side wall is provided with a crucible opening, and the lower end of the second side wall is connected to the upper end of the first side wall. The heat conductivity coefficient of the second body is larger than the heat conductivity coefficient of the first body. A heating part for heating the crucible is usually set on the first body, so that when heat is conducted from the first body to the second body, heat loss can be reduced because the heat conductivity coefficient of the second body is larger, and the temperature at the crucible opening of the second body is higher relatively, thus reducing even avoiding condensation of an evaporation material on the crucible opening so as to reduce a sealing phenomenon. The temperature difference between the crucible opening of the second body and the crucible bottom of the first body is small, so that a material in the crucible is heated evenly and burst explosion phenomena caused by uneven heating are reduced.

Description

technical field [0001] The invention relates to a crucible for evaporation process. Background technique [0002] The evaporation process is an important technical route for the production of OLEDs, and the crucible is an essential tool for using the evaporation process. The material and structural design of the crucible have an important impact on the film-forming quality and production efficiency of organic materials. [0003] Such as Figure 1A with Figure 1B As shown, the traditional crucible is an integral structure, including a cylindrical side wall 11 and a crucible bottom 10 integrally formed at the bottom of the side wall 11 , and a crucible opening 12 is formed at the top of the cylindrical side wall 11 . The material to be evaporated is placed in the cavity 12 surrounded by the cylindrical side wall 11 and the crucible bottom 10 . [0004] At present, commonly used crucible materials include metal, alumina, quartz, etc., and crucibles of different materials ha...

Claims

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Application Information

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IPC IPC(8): C23C14/24
Inventor 张斌刘凤
Owner EVERDISPLAY OPTRONICS (SHANGHAI) CO LTD
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