Intermediate infrared region magnetic resonance metamaterial structure based on silicon and preparation method thereof

Abstract

The invention provides an intermediate infrared region magnetic resonance metamaterial structure based on silicon. The structure comprises a substrate and silicon cubes, wherein the substrate is a glass substrate, the silicon cubes are distributed on the glass substrate periodically, the side length of each silicon cube is L, the value of the L ranges from one micro to five microns, the spacing distance between every two adjacent silicon cubes is W, and the value of the W ranges from one micro to five microns. The invention further provides a preparation method of the intermediate infrared region magnetic resonance metamaterial structure based on silicon, and the intermediate infrared region magnetic resonance metamaterial structure is obtained through a photoetching method. According to the intermediate infrared region magnetic resonance metamaterial structure based on silicon and the preparation method based on the intermediate infrared region magnetic resonance metamaterial structure based on silicon, electric conductance loss is effectively reduced, application, such as design of a filter, a polarizer and a spectrum transmitter, focusing on an intermediate infrared band is achieved, and a magnetic resonance metamaterial which is low in loss, insensitive to polarization, capable of being expanded in a three-dimensional mode and low in cost can be really implemented.

Description

technical field [0001] The invention relates to the field of integrated optics, in particular to the design of a silicon-based mid-infrared region magnetic resonance metamaterial structure. Background technique [0002] Traditional magnetic resonance metamaterials use metal materials (such as gold, silver, etc.) to design a structure similar to a split resonant ring to achieve magnetic resonance. Due to the high conductance loss of metal itself, the application of magnetic resonance materials with metal structures is limited. . [0003] The preparation process of magnetic resonance metamaterials with metal structures is relatively difficult, and it is difficult to expand to three-dimensional structures. Moreover, the generally designed structures are asymmetric and are also very sensitive to the polarization direction of incident light. [0004] At present, the structure designed with ceramic materials can realize the magnetic resonance in the millimeter wave band. Accordin...

AI Technical Summary

Problems solved by technology

But germanium / tellurium films are not easy to prepare and are expensive in practical applications so that they cannot be widely used. Therefore, it is necessary to seek a similar germanium / tellurium film that can achieve magnetic resonance effects and is cheap and easier to realize micro-nano films. prepared material

[0013] In terms of the design of magnetic resonance metamaterials, researchers have done a lot of work at present, but in the mid-infrared band of magnetic resonance metamaterials, there is still a lack of systematic research and summary on the change of resonance wavelength with the structure.

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