Texturing process for polycrystalline silicon solar cell slice
A technology for solar cells and polycrystalline silicon, which is applied in sustainable manufacturing/processing, circuits, crystal growth, etc., and can solve the problems of high reflectivity of silicon wafers, unfavorable photoelectric conversion efficiency of polycrystalline silicon solar cells, and poor texture uniformity.
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Embodiment 1
[0022] A texturing process for polycrystalline silicon solar cells, comprising the following steps in sequence:
[0023] (1) Spraying a layer of silicon dioxide particles with a particle size of 300nm on the surface of the silicon wafer;
[0024] (2) Carry out 90s primary texturing in a mixed solution containing nitric acid and hydrofluoric acid, wherein the ratio of nitric acid and hydrofluoric acid is 5:1;
[0025] (3) Clean the silicon chip first, then remove the acid for 100 s in a 5% sodium hydroxide solution by mass fraction, and then clean again after the acid removal;
[0026] (4) Carry out secondary texturing for 60s in a mixed solution containing nitric acid and hydrofluoric acid, wherein the ratio of nitric acid and hydrofluoric acid is 4:1;
[0027] (5) Clean the silicon wafer first, and then deacidify it in a sodium hydroxide solution with a mass fraction of 5% for 120 seconds. After deacidification, clean it, and dry it at 35° C. for 60 seconds after cleaning. ...
Embodiment 2
[0030] A texturing process for polycrystalline silicon solar cells, comprising the following steps in sequence:
[0031] (1) Spraying a layer of silicon dioxide particles with a particle size of 400nm on the surface of the silicon wafer;
[0032] (2) Carry out 90s primary texturing in a mixed solution containing nitric acid and hydrofluoric acid, wherein the ratio of nitric acid and hydrofluoric acid is 5:1;
[0033] (3) Clean the silicon chip first, then remove the acid for 100 s in a 5% sodium hydroxide solution by mass fraction, and then clean again after the acid removal;
[0034] (4) Carry out secondary texturing for 60s in a mixed solution containing nitric acid and hydrofluoric acid, wherein the ratio of nitric acid and hydrofluoric acid is 4:1;
[0035] (5) Clean the silicon wafer first, and then deacidify it in a sodium hydroxide solution with a mass fraction of 5% for 120 seconds. After deacidification, clean it. After cleaning, dry it at 35° C. for 90 seconds.
[...
Embodiment 3
[0038] A texturing process for polycrystalline silicon solar cells, comprising the following steps in sequence:
[0039] (1) Spraying a layer of silicon dioxide particles with a particle size of 500nm on the surface of the silicon wafer;
[0040] (2) Carry out 90s primary texturing in a mixed solution containing nitric acid and hydrofluoric acid, wherein the ratio of nitric acid and hydrofluoric acid is 5:1;
[0041] (3) Clean the silicon chip first, then remove the acid for 100 s in a sodium hydroxide solution with a mass fraction of 10%, and then clean it again after removing the acid;
[0042] (4) Carry out secondary texturing for 60s in a mixed solution containing nitric acid and hydrofluoric acid, wherein the ratio of nitric acid and hydrofluoric acid is 4:1;
[0043] (5) Clean the silicon wafer first, and then deacidify it in a sodium hydroxide solution with a mass fraction of 10% for 120s. After deacidifying, clean it, and dry it at 35°C for 120s after cleaning.
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