Spatial Modulation Fourier Transform Infrared Spectrometer Based on Grid Beamsplitter

Abstract

Spatially modulated Fourier transform infrared spectrometer based on a grid beam splitter, involving the field of spectral analysis instruments, solves the problem of large volume and weight caused by the existence of movable parts in the structure of existing spectrometers, including collimation systems, samples Pool, interference system, beam reduction system and detector, the interference system includes multi-level small-step micro-mirror, grid beam splitter and multi-level large-step micro-mirror; the light emitted by the infrared light source is collimated by the collimation system into Infrared parallel light, the parallel light is absorbed by the sample in the sample cell and then divided into two coherent beams of light by the grid beam splitter; the two beams of light are respectively incident on the multi-level large-step micro-mirror and the multi-level small-step micro-mirror, and It is reflected to the grid beam splitter by the multi-level small ladder micro-mirror; the light reflected by the grid beam splitter is passed through the beam reduction system, and the interference fringes are obtained on the infrared area detector; the interference fringes are made The spectral information of the analyte can be obtained by the Lie transform.

Description

technical field [0001] The invention relates to the field of spectral analysis instruments, and relates to a novel spatially modulated infrared Fourier transform spectrometer system, in particular to a novel spatially modulated Fourier transform infrared spectrometer system based on grid-type beam splitters and multi-level stepped micromirrors. spectrometer. Background technique [0002] Due to its high luminous flux and multi-channel transmission capability, Fourier transform spectrometer is widely used in the analysis of material spectral characteristics. It can perform high-precision spectral measurement, perform qualitative or quantitative analysis, and detect unknown substances, so it has been widely used in many fields. At present, there is an urgent need for high-precision, miniaturized and lightweight Fourier infrared spectroscopy analysis systems in the fields of environmental and security monitoring, medical analysis and detection, space detection, meteorological ...

AI Technical Summary

Problems solved by technology

[0003] In order to solve the problem that there are movable parts in the structure of the existing spectrometer, which leads to its large volume and weight, expensive operation and maintenance costs, and the inability to realize real-time and on-line measurement, the present invention provides a spatial spectrometer based on a grid beam splitter. Modulated Fourier Transform Infrared Spectrometer

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