Interference microscope system based on programmable illumination
A technology of interference microscope and illumination light source, which is applied in the field of interference microscope, can solve the problems of interference pattern distortion, difference of incident light reflectivity, and influence on the measurement accuracy of interference microscope, and achieve the effect of good three-dimensional shape and guaranteed accuracy
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[0036] In order to make the technical means, creative features, goals and effects achieved by the present invention easy to understand, the present invention will be further described below in conjunction with specific diagrams.
[0037] A specific implementation method of an interference microscope system based on programmable illumination proposed by the present invention will be described below with reference to the accompanying drawings.
[0038] The structure of the example 1 of the present invention is as figure 1 As shown, the specific steps are:
[0039] At first the illumination source 1 can obtain collimated uniform light through the illumination module; the refraction of the obtained collimated uniform light will be incident on the digital micromirror device (DMD) 5 with 24 ° through the TIR prism 6, and this is because the DMD The deflection angle of the micro-mirror on the chip is 12°; then the "on" or "off" state of each micro-mirror is artificially controlled b...
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