Connecting device for sealing ultrahigh vacuum high heat load optical element cooling water way

Abstract

The invention relates to a connecting device for sealing an ultrahigh vacuum high heat load optical element cooling water way, and belongs to the research field of heat slow release of optical elements in an ultrahigh vacuum environment. In order to solve the problems in the prior art, a water pipe and a connecting nut assembly are installed in a through hole in a modified connecting flange, a flange O-ring is installed on the modified connecting flange, and the modified connecting flange and a multi-functional transforming weld assembly are connected and fastened in a sealed mode through a connecting flange fastening ring B; a cutting edge seal ring A and a cutting edge seal ring B are respectively installed in the multi-functional transforming weld assembly, the installed water pipe and the connecting nut assembly are connected with the water way in a sealed mode by connecting the water pipe with a two-way joint, a water pipe protective sleeve corrugated pipe weld assembly and the multi-functional transforming weld assembly are connected in a sealed mode through the cutting edge seal ring A, and the water pipe protective sleeve corrugated pipe weld assembly and a nut assembly are fastened in a sealed mode through a gasket A and a bolt A; a compression screw, a seal flange, an elastic lock nut and a low vacuum seal ring are connected with the modified connecting flange and seal the water pipe and the connecting nut assembly. The connecting device improves working efficiency.

Description

Technical field [0001] The invention relates to a connection device for sealing a cooling water circuit of an optical element with high heat load in an ultra-high vacuum, and belongs to the field of research on thermal slow release of an optical element in an ultra-high vacuum environment. Background technique [0002] The surface of the high heat-load optical element working in the ultra-high vacuum environment causes heat absorption on the surface of the optical element under the irradiation of the high-energy beam, and the thermal deformation of the optical surface after heating affects the spot quality and reduces the optical surface reflectivity. [0003] In order to reduce the effect of thermal deformation on the surface of the optical element working in an ultra-high vacuum environment, water cooling must be used to reduce the heating of the optical element. The connection and optimization of the cooling water circuit sealing of the high heat load optical element in the ultr...

AI Technical Summary

Problems solved by technology

[0004] In the prior art, the sealing connection of the cooling water circuit of the high heat load optical element in the ultra-high vacuum environment is realized. The ultra-high vacuum inner seal is used to connect the water channel input and output ports. The bellows sealing flange must be installed on the inner bottom plate of the ultra-high vacuum chamber. Once the leak detection of the water pipe sheath bellows sealing flange exceeds the standard in the ultra-high vacuum environment, the entire chamber must be removed for maintenance. convenient

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